On the Fly Ellipsometry Imaging for Process Deviation Detection
Alcaire, T., Le Cunff, D., Soulan, S., Tortai, J.-H.
Published in IEEE transactions on semiconductor manufacturing (01.08.2022)
Published in IEEE transactions on semiconductor manufacturing (01.08.2022)
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Journal Article
Resist trimming etch process control using dynamic scatterometry
El kodadi, M., Soulan, S., Besacier, M., Schiavone, P.
Published in Microelectronic engineering (01.04.2009)
Published in Microelectronic engineering (01.04.2009)
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Journal Article
Conference Proceeding
Inverse problem solving and optical index determination of resist films by ellipsometry
Tortai, J.H., Akbalik Rapine, A., Soulan, S., Schiavone, P.
Published in Microelectronic engineering (01.05.2010)
Published in Microelectronic engineering (01.05.2010)
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Journal Article
Conference Proceeding
UV impact on the optical properties of thin films of positive tone chemically amplified resist
Tortai, J.H., Trouvé, H., Soulan, S., Akbalik Rapine, A.
Published in Microelectronic engineering (01.04.2009)
Published in Microelectronic engineering (01.04.2009)
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Journal Article
Conference Proceeding