Directed Self-Assembly and Pattern Transfer of Five Nanometer Block Copolymer Lamellae
Lane, Austin P, Yang, XiaoMin, Maher, Michael J, Blachut, Gregory, Asano, Yusuke, Someya, Yasunobu, Mallavarapu, Akhila, Sirard, Stephen M, Ellison, Christopher J, Willson, C. Grant
Published in ACS nano (22.08.2017)
Published in ACS nano (22.08.2017)
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Journal Article
Synthesis and Characterization of Si-containing Block Co-polymers with Resolution beyond 10 nm
Someya, Yasunobu, Asano, Yusuke, Maher, Michael J., Blachut, Gregory, Lane, Austin P., Sirard, Stephen, Ellison, Christopher J., Willson, C. Grant
Published in Journal of Photopolymer Science and Technology (01.01.2016)
Published in Journal of Photopolymer Science and Technology (01.01.2016)
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Journal Article
Synthesis and Characterization of Si-containing Block Co-polymers with Resolution beyond 10 nm
Someya, Yasunobu, Asano, Yusuke, Maher, Michael J, Blachut, Gregory, Lane, Austin P, Sirard, Stephen, Ellison, Christopher J, C. Grant Willson
Published in Journal of photopolymer science and technology (2016)
Published in Journal of photopolymer science and technology (2016)
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Journal Article
COMPOSITION FOR FORMING RESIST UNDERLAYER FILM HAVING DISULFIDE STRUCTURE
ENDO TAKAFUMI, MIZUOCHI RYUTA, KAMIBAYASHI SATOSHI, GOTO YUICHI, SOMEYA YASUNOBU
Year of Publication 31.10.2023
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Year of Publication 31.10.2023
Patent
A Hybrid Chemo-/Grapho-Epitaxial Alignment Strategy for Defect Reduction in Sub-10 nm Directed Self-Assembly of Silicon-Containing Block Copolymers
Blachut, Gregory, Sirard, Stephen M, Maher, Michael J, Asano, Yusuke, Someya, Yasunobu, Lane, Austin P, Durand, William J, Bates, Christopher M, Dinhobl, Andrew M, Gronheid, Roel, Hymes, Diane, Ellison, Christopher J, Willson, C. Grant
Published in Chemistry of materials (27.12.2016)
Published in Chemistry of materials (27.12.2016)
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미세 상분리패턴 형성을 위한 블록코폴리머층 형성 조성물
MIZUOCHI RYUTA, TADOKORO SHINSUKE, WAKAYAMA HIROYUKI, KOZAWA MASAMI, SOMEYA YASUNOBU
Year of Publication 24.03.2021
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Year of Publication 24.03.2021
Patent