VUV-Stimulated MO CVD Processes of Copper Layer Deposition
Igumenov, Igor K., Kuchumov, Boris M., Kozlova, Svetlana, Koretskaya, Tat'yana P., Trubin, Sergey V., Sokuev, Roman, Lyakh, Vladimir, Kruchinin, Vladimir
Published in ECS transactions (01.01.2009)
Published in ECS transactions (01.01.2009)
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Journal Article
VUV-Stimulated MOCVD Processes of Copper Layer Deposition
Igumenov, Igor K., Kuchumov, Boris M., Kozlova, Svetlana, Koretskaya, Tat'yana P., Trubin, Sergey V., Sokuev, Roman, Lyakh, Vladimir, Kruchinin, Vladimir
Published in Meeting abstracts (Electrochemical Society) (20.07.2009)
Published in Meeting abstracts (Electrochemical Society) (20.07.2009)
Get full text
Journal Article