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Published in 2018 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2018)
Published in 2018 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2018)
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE OPERATING METHOD
OTSU, Kazuya, SOBUKAWA, Hiroshi, KANEHIRA, Masayuki, TSUJIMURA, Manabu, SHINOZAKI, Hiroyuki, SAKATA, Keisuke
Year of Publication 01.11.2018
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Year of Publication 01.11.2018
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MAGNETIC LEVITATED PUMP
MORI SATOSHI, SATO ICHIJU, SOBUKAWA HIROSHI, OHASHI TOMONORI, BARADA TOSHIMITSU
Year of Publication 16.05.2016
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Year of Publication 16.05.2016
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ELECTRON BEAM INSPECTION DEVICE AND METHOD WITH FOREIGN MATERIAL ANTI-ATTACHING FUNCTION
TSUKAMOTO KIWAMU, HATAKEYAMA MASAHIRO, HAYASHI TAKEHIDE, SOBUKAWA HIROSHI, KOHAMA TATSUYA, WATANABE KENJI, TERAO KENJI, NAITO YOSHIHIKO, MURAKAMI TAKESHI, KIMURA NORIO
Year of Publication 12.04.2012
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Year of Publication 12.04.2012
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Magnetic levitated pump
Mori, Satoshi, Sato, Ichiju, Barada, Toshimitsu, Ohashi, Tomonori, Sobukawa, Hiroshi
Year of Publication 04.05.2021
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Year of Publication 04.05.2021
Patent
ELECTRON BEAM DEVICE
MIYAMOTO, MATSUTARO, MURAKAMI, TAKESHI, KARIMATA, TSUTOMU, KIMBA, TOSHIFUMI, MORI, SATOSHI, SOBUKAWA, HIROSHI, NAKASUJI, MAMORU, SATAKE, TOHRU
Year of Publication 01.02.2007
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Year of Publication 01.02.2007
Patent
Particle removal characteristics in liquid flow during wafer rotation
Handa, Naoyuki, Hamada, Satomi, Imai, Masayoshi, Wada, Yutaka, Sobukawa, Hiroshi, Hiyama, Hirokuni, Amagai, Kenji
Published in 2018 IEEE 2nd Electron Devices Technology and Manufacturing Conference (EDTM) (01.03.2018)
Published in 2018 IEEE 2nd Electron Devices Technology and Manufacturing Conference (EDTM) (01.03.2018)
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