FABRICATION OF A MICROCHANNEL PLATE FROM A PERFORATED SILICON WORKPIECE
SOAVE, ROBERT, J, THEN, ALAN, M, TASKER, G., WILLIAM, SHANK, STEVEN, M
Year of Publication 13.02.1997
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Year of Publication 13.02.1997
Patent
A multilevel tungsten interconnect technology
Thomas, D.C., Wong, S.S., Dinsmore, D.R., Soave, R.J.
Published in Technical Digest., International Electron Devices Meeting (1988)
Published in Technical Digest., International Electron Devices Meeting (1988)
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Conference Proceeding