조밀한 라인 패터닝을 위한 EUV 리소그래피 시스템
SMITH DANIEL GENE, RENWICK STEPHEN P, BINNARD MICHAEL B, FLAGELLO DONIS G, WILLIAMSON DAVID M
Year of Publication 29.03.2019
Get full text
Year of Publication 29.03.2019
Patent
APPARATUS, OPTICAL ASSEMBLY, METHOD FOR INSPECTION OR MEASUREMENT OF AN OBJECT AND METHOD FOR MANUFACTURING A STRUCTURE
SMITH DANIEL GENE, PHARAND MICHEL, STAMPER BRIAN L, COOPER ALEXANDER, WILLIAMSON DAVID MICHAEL, GOODWIN ERIC PETER, ROBERTSON ALEC
Year of Publication 27.09.2013
Get full text
Year of Publication 27.09.2013
Patent
Spatially filtered talbot interferometer for wafer distortion measurement
Smith, Daniel Gene, Toba, Hidemitsu, Kibayashi, Shunsuke, Otaki, Katsura, Goodwin, Eric Peter, Goldstein, Goldie Lynne
Year of Publication 01.10.2024
Get full text
Year of Publication 01.10.2024
Patent
METHODS FOR LARGE-SCALE OPTICAL MANUFACTURING
SMITH, Daniel Gene, PHILLIPS, Alton Hugh, DURKO, Heather Lynn, NAITO, Kaneyuki, BINNARD, Michael Birk, ICHINOSE, Go
Year of Publication 08.05.2024
Get full text
Year of Publication 08.05.2024
Patent