MOCVD growth and characterization of vanadium dioxide films
Yakovkina, L. V., Mutilin, S. V., Prinz, V. Ya, Smirnova, T. P., Shayapov, V. R., Korol’kov, I. V., Maksimovsky, E. A., Volchok, N. D.
Published in Journal of materials science (01.04.2017)
Published in Journal of materials science (01.04.2017)
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Journal Article
Synthesis and properties of dielectric (HfO2)1 − x(Sc2O3)x films
Yakovkina, L. V., Smirnova, T. P., Borisov, V. O., Kichai, V. N., Kaichev, V. V.
Published in Inorganic materials (01.02.2013)
Published in Inorganic materials (01.02.2013)
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Journal Article
SiCN alloys obtained by remote plasma chemical vapour deposition from novel precursors
Smirnova, T.P., Badalian, A.M., Yakovkina, L.V., Kaichev, V.V., Bukhtiyarov, V.I., Shmakov, A.N., Asanov, I.P., Rachlin, V.I., Fomina, A.N.
Published in Thin solid films (01.04.2003)
Published in Thin solid films (01.04.2003)
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Journal Article
Oxygen vacancy in Al2O3: Photoluminescence study and first-principle simulation
Pustovarov, V.A., Perevalov, T.V., Gritsenko, V.A., Smirnova, T.P., Yelisseyev, A.P.
Published in Thin solid films (29.07.2011)
Published in Thin solid films (29.07.2011)
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Journal Article
Phase composition of nanosized oxide film structures based on lanthanum and scandium doped HfO2
Smirnova, T. P., Yakovkina, L. V., Borisov, V. O., Lebedev, M. S.
Published in Journal of structural chemistry (01.12.2017)
Published in Journal of structural chemistry (01.12.2017)
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Journal Article
The crystal structure of solid solutions formed in the HfO2-Sc2O3 nanoscale system
Smirnova, T.P., Saraev, A.A., Korolkov, I.V., Kitchai, V.N., Borisov, V.O.
Published in Journal of crystal growth (01.10.2019)
Published in Journal of crystal growth (01.10.2019)
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Journal Article
New laser plasma process to obtain solid coatings and their structural characteristics
Demin, V. N., Smirnova, T. P., Borisov, V. O., Grachev, G. N., Smirnov, A. L., Khomyakov, M. N.
Published in Journal of structural chemistry (01.12.2017)
Published in Journal of structural chemistry (01.12.2017)
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Journal Article
Laser plasmochemical synthesis of hard protective SiCN films
Demin, V. N., Smirnova, T. P., Borisov, V. O., Grachev, G. N., Smirnov, A. L., Khomyakov, M. N.
Published in Surface engineering (01.08.2015)
Published in Surface engineering (01.08.2015)
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Journal Article
Physical-chemical properties of silicon carbonitride films prepared using laser-plasma deposition from hexamethyldisilazane
Demin, V. N., Smirnova, T. P., Borisov, V. O., Grachev, G. N., Smirnov, A. L., Khomyakov, M. N.
Published in Glass physics and chemistry (01.03.2015)
Published in Glass physics and chemistry (01.03.2015)
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Journal Article
Plasma Deposition and Properties of Silicon Carbonitride Films
Smirnova, T. P., Badalyan, A. M., Borisov, V. O., Kaichev, V. V., Bakhturova, L. F., Kichai, V. N., Rakhlin, V. I., Shainyan, B. A.
Published in Inorganic materials (01.07.2005)
Published in Inorganic materials (01.07.2005)
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Journal Article
Composition and structure of hafnia films on silicon
Smirnova, T. P., Kaichev, V. V., Yakovkina, L. V., Kosyakov, V. I., Beloshapkin, S. A., Kuznetsov, F. A., Lebedev, M. S., Gritsenko, V. A.
Published in Inorganic materials (01.09.2008)
Published in Inorganic materials (01.09.2008)
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Journal Article
Plasma-chemical deposition of SiCN films from volatile N-bromhexamethyldisilazane
Smirnova, T. P., Badalian, A. M., Borisov, V. O., Bakhturova, L. F., Kaichev, V. V., Podgorbunskaya, T. A., Rakhlin, V. I.
Published in Inorganic materials (01.12.2008)
Published in Inorganic materials (01.12.2008)
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Journal Article
Effect of the chemical structure of silyl derivatives of unsymmetrical dimethylhydrazine on the composition and structure of silicon carbonitride films: Theoretical and experimental studies
Smirnova, T. P., Shainyan, B. A., Borisov, V. O., Rakhlin, V. I.
Published in Inorganic materials (01.04.2007)
Published in Inorganic materials (01.04.2007)
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Journal Article
Preparation and Properties of Thin HfO2 Films
Yakovkina, L. V., Kichai, V. N., Smirnova, T. P., Kaichev, V. V., Shubin, Yu. V., Morozova, N. B., Zherikova, K. V., Igumenov, I. K.
Published in Inorganic materials (01.12.2005)
Published in Inorganic materials (01.12.2005)
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