SUPPORT, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
SIJBEN ANKO JOZEF CORNELUS, GILISSEN NOUD JAN, SMEETS MARTIN FRANS PIERRE, FIEN MENNO, CUIJPERS MARTINUS AGNES WILLEM
Year of Publication 11.06.2013
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Year of Publication 11.06.2013
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LITHOGRAPHIC APPARATUS COMPRISING A MAGNET, METHOD FOR THE PROTECTION OF A MAGNET IN A LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
LOOPSTRA ERIK ROELOF, KEMPEN ANTONIUS THEODORUS WILHELMUS, MOORS JOHANNES HUBERTUS JOSEPHINA, SMEETS MARTIN FRANS PIERRE, KOSTER NORBERTUS BENEDICTUS
Year of Publication 18.11.2010
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Year of Publication 18.11.2010
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Lithographic apparatus and device manufacturing method involving a heater
Boom, Herman, Ten Kate, Nicolaas, De Mol, Christianus Gerardus Maria, Quaedackers, Johannes Anna, De Jong, Frederik Eduard, Nihtianov, Stoyan, Riepen, Michel, Mertens, Jeroen Johannes Sophia Maria, Loopstra, Erik Roelof, Moerman, Richard, Menchtchikov, Boris, Van Meer, Aschwin Lodewijk Hendricus Johannes, Goorman, Koen, Cadee, Theodorus Petrus Maria, Stavenga, Marco Koert, Tinnemans, Patricius Aloysius Jacobus, Verspay, Jacobus Johannus Leonardus Hendricus, Jacobs, Johannes Henricus Wilhelmus, Reuhman-Huisken, Maria Elisabeth, Verhagen, Martinus Cornelis Maria, Smeets, Martin Frans Pierre, Schoondermark, Bart Leonard Peter, Van Der Net, Antonius Johannus, Janssen, Franciscus Johannes Joseph, Ottens, Joost Jeroen, Muitjens, Marcel Johannus Elisabeth Hubertus
Year of Publication 05.07.2022
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Year of Publication 05.07.2022
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Beam position displacement correction in charged particle inspection
BOSCH, NIELS JOHANNES MARIA, GOOSSENS, JEF, SMEETS, MARTIN FRANS PIERRE, VAN AAKEN, WILLEM PETRUS, CHEN, TE-YU, SAHIN, FUNDA
Year of Publication 16.09.2023
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Year of Publication 16.09.2023
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Assessment apparatus and methods
HEMPENIUS, PETER PAUL, SLOT, ERWIN, BOSCH, NIELS JOHANNES MARIA, HAARTSEN, THOMAS IZAAK FRED, SMEETS, MARTIN FRANS PIERRE, GRASMAN, JASPER HENDRIK, PRIL, WOUTER ONNO, CHEN, TE-YU
Year of Publication 16.03.2024
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Year of Publication 16.03.2024
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A HEATER
TEN KATE, Nicolaas, VAN DER NET, Antonius Johannus, JANSSEN, Franciscus Johannes Joseph, DE JONG, Frederik Eduard, SMEETS, Martin Frans Pierre, RIEPEN, Michel, TINNEMANS, Patricius Aloysius Jacobus, VERHAGEN, Martinus Cornelis Maria, OTTENS, Joost Jeroen, MOERMAN, Richard, BOOM, Herman, REUHMAN-HUISKEN, Maria Elisabeth, VERSPAY, Jacobus Johannus Leonardus Hendricus, STAVENGA, Marco Koert, LOOPSTRA, Erik Roelof, GOORMAN, Koen, QUAEDACKERS, Johannes Anna, DE MOL, Christianus Gerardus Maria, MENCHTCHIKOV, Boris, NIHTIANOV, Stoyan, SCHOONDERMARK, Bart Leonard Peter, JACOBS, Johannes Henricus Wilhelmus, VAN MEER, Aschwin Lodewijk Hendricus Johannes, MUITJENS, Marcel Johannus Elisabeth Hubertus, MERTENS, Jeroen Johannes Sophia Maria, CADEE, Theodorus Petrus Maria
Year of Publication 04.03.2021
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Year of Publication 04.03.2021
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Lithographic apparatus and device manufacturing method involving a heater
Boom, Herman, Ten Kate, Nicolaas, De Mol, Christianus Gerardus Maria, Quaedackers, Johannes Anna, De Jong, Frederik Eduard, Nihtianov, Stoyan, Riepen, Michel, Mertens, Jeroen Johannes Sophia Maria, Loopstra, Erik Roelof, Moerman, Richard, Menchtchikov, Boris, Van Meer, Aschwin Lodewijk Hendricus Johannes, Goorman, Koen, Cadee, Theodorus Petrus Maria, Stavenga, Marco Koert, Tinnemans, Patricius Aloysius Jacobus, Verspay, Jacobus Johannus Leonardus Hendricus, Jacobs, Johannes Henricus Wilhelmus, Reuhman-Huisken, Maria Elisabeth, Verhagen, Martinus Cornelis Maria, Smeets, Martin Frans Pierre, Schoondermark, Bart Leonard Peter, Van Der Net, Antonius Johannus, Janssen, Franciscus Johannes Joseph, Ottens, Joost Jeroen, Muitjens, Marcel Johannus Elisabeth Hubertus
Year of Publication 17.11.2020
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Year of Publication 17.11.2020
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A HEATER
TEN KATE, Nicolaas, VAN DER NET, Antonius Johannus, JANSSEN, Franciscus Johannes Joseph, DE JONG, Frederik Eduard, SMEETS, Martin Frans Pierre, RIEPEN, Michel, TINNEMANS, Patricius Aloysius Jacobus, VERHAGEN, Martinus Cornelis Maria, OTTENS, Joost Jeroen, MOERMAN, Richard, BOOM, Herman, REUHMAN-HUISKEN, Maria Elisabeth, VERSPAY, Jacobus Johannus Leonardus Hendricus, STAVENGA, Marco Koert, LOOPSTRA, Erik Roelof, GOORMAN, Koen, QUAEDACKERS, Johannes Anna, DE MOL, Christianus Gerardus Maria, MENCHTCHIKOV, Boris, NIHTIANOV, Stoyan, SCHOONDERMARK, Bart Leonard Peter, JACOBS, Johannes Henricus Wilhelmus, VAN MEER, Aschwin Lodewijk Hendricus Johannes, MUITJENS, Marcel Johannus Elisabeth Hubertus, MERTENS, Jeroen Johannes Sophia Maria, CADEE, Theodorus Petrus Maria
Year of Publication 01.08.2019
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Year of Publication 01.08.2019
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Lithographic apparatus and device manufacturing method involving a heater
Boom, Herman, Ten Kate, Nicolaas, De Mol, Christianus Gerardus Maria, Quaedackers, Johannes Anna, De Jong, Frederik Eduard, Nihtianov, Stoyan, Riepen, Michel, Mertens, Jeroen Johannes Sophia Maria, Loopstra, Erik Roelof, Moerman, Richard, Menchtchikov, Boris, Van Meer, Aschwin Lodewijk Hendricus Johannes, Goorman, Koen, Cadee, Theodorus Petrus Maria, Stavenga, Marco Koert, Tinnemans, Patricius Aloysius Jacobus, Verspay, Jacobus Johannus Leonardus Hendricus, Jacobs, Johannes Henricus Wilhelmus, Reuhman-Huisken, Maria Elisabeth, Verhagen, Martinus Cornelis Maria, Smeets, Martin Frans Pierre, Schoondermark, Bart Leonard Peter, Van Der Net, Antonius Johannus, Janssen, Franciscus Johannes Joseph, Ottens, Joost Jeroen, Muitjens, Marcel Johannus Elisabeth Hubertus
Year of Publication 09.04.2019
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Year of Publication 09.04.2019
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SUPPORT, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
SIJBEN ANKO JOZEF CORNELUS, GILISSEN NOUD JAN, SMEETS MARTIN FRANS PIERRE, FIEN MENNO, CUIJPERS MARTINUS AGNES WILLEM
Year of Publication 13.06.2013
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Year of Publication 13.06.2013
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Lithographic apparatus comprising a magnet, method for the protection of a magnet in a lithographic apparatus and device manufacturing method
LOOPSTRA ERIK ROELO, KEMPEN ANTONIUS THEODORUS WILHELMUS, MOORS JOHANNES HUBERTUS JOSEPHINA, SMEETS MARTIN FRANS PIERRE, KOSTER NORBERTUS BENEDICTUS
Year of Publication 21.05.2013
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Year of Publication 21.05.2013
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Method for Calibrating a Target Surface of a Position Measurement System, Position Measurement System, and Lithographic Apparatus
LEVASIER LEON MARTIN, SMEETS MARTIN FRANS PIERRE, KNIJN PAULUS JOHANNES, HOOGENDAM CHRISTIAAN ALEXANDER, BLOK ROLAND, CUIJPERS MARTINUS AGNES WILLEM
Year of Publication 29.03.2012
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Year of Publication 29.03.2012
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Lithographic apparatus and device manufacturing method
VAN GOMPEL EDWIN AUGUSTINUS MA, VAN DER MEULEN FRITS, SIMONS WILHELMUS FRANCISCUS JO, LEENDERS MARTINUS HENDRIKUS AN, KUSTERS GERARDUS ADRIANUS ANTO, OTTENS JOOST JEROEN, DE JONG FREDERIK EDUARD, VAN BAREN MARTIJN, SMEETS MARTIN FRANS PIERRE, CUIJPERS MARTINUS AGNES WILLEM, CADEE THEODORUS PETRUS MARIA, WIJCKMANS MAURICE, JANSEN ROB
Year of Publication 15.04.2015
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Year of Publication 15.04.2015
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Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor
VAN DER NET ANTONIUS JOHANNUS, JACOBS JOHANNES HENRICUS WILHELMUS, KATE NICOLAAS TEN, REUHMAN-HUISKEN MANA ELISABETH, MOERMAN RICHARD, STAVENGA MARCO KOERT, SCHOONDERMARK BART LEONARD PETER, MENCHTCHIKOV BORIS, MERTENS JEROEN JOHANNES SOPHIA MARIA, OTTENS JOOST JEROEN, DE JONG FREDERIK EDUARD, VERMEER ASCHWIN LODEWIJK HENDRICUS JOHANNES, NIHTIANOV STOYAN, DE MOL CHRISTIANUS GERARDUS MARIA, MUITJENS MARCEL JOHANNUS ELISABETH HUBERTUS, QUAEDACKERS JOHANNES ANNA, CADEE THEODORUS PETRUS MARIA, JANSSEN FRANCISCUS JOHANNES JOSEPH, VERHAGEN MARTINUS CORNELIS MARIA, BOOM HERMAN, GOORMAN KOEN, LOOPSTRA ERIK ROELOF, RIEPEN MICHEL, SMEETS MARTIN FRANS PIERRE, TINNEMANS PATRICIUS ALOYSIUS JACOBUS, VERSPAY JACOBUS JOHANNUS LEONARDUS HENDRICUS
Year of Publication 23.02.2016
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Year of Publication 23.02.2016
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A HEATER
VAN DER NET ANTONIUS JOHANNUS, REUHMAN-HUISKEN MARIA ELISABETH, WILHELMUS JACOBS JOHANNES HENRICUS, JOHANNES VERMEER ASCHWIN LODEWIJK HENDRICUS, HENDRICUS VERSPA Y JACOBUS JOHANNUS LEONARDUS, MOERMAN RICHARD, STAVENGA MARCO KOERT, SCHOONDERMARK BART LEONARD PETER, MENCHTCHIKOV BORIS, TEN KATE NICOLAAS, OTTENS JOOST JEROEN, DE JONG FREDERIK EDUARD, NIHTIANOV STOYAN, DE MOL CHRISTIANUS GERARDUS MARIA, QUAEDACKERS JOHANNES ANNA, CADEE THEODORUS PETRUS MARIA, JANSSEN FRANCISCUS JOHANNES JOSEPH, VERHAGEN MARTINUS CORNELIS MARIA, BOOM HERMAN, GOORMAN KOEN, LOOPSTRA ERIK ROELOF, MARIA MERTENS JEROEN JOHANNES SOPHIA, RIEPEN MICHEL, HUBERTUS MUITJENS MARCEL JOHANNUS ELISABETH, SMEETS MARTIN FRANS PIERRE, TINNEMANS PATRICIUS ALOYSIUS JACOBUS
Year of Publication 18.02.2016
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Year of Publication 18.02.2016
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Lithographic apparatus and device manufacturing method
VAN DER MEULEN FRITS, SIMONS WILHELMUS FRANCISCUS JOHANNES, LEENDERS MARTINUS HENDRIKUS ANTONIUS, OTTENS JOOST JEROEN, DE JONG FREDERIK EDUARD, VAN BAREN MARTIJN, SMEETS MARTIN FRANS PIERRE, KUSTERS GERARDUS ADRIANUS ANTONIUS MARIA, CUIJPERS MARTINUS AGNES WILLEM, CADEE THEODORUS PETRUS MARIA, VAN GOMPEL EDWIN AUGUSTINUS MATHEUS, WIJCKMANS MAURICE, JANSEN ROB
Year of Publication 16.12.2014
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Year of Publication 16.12.2014
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