기판 지지부와 가스 분배 디바이스 사이의 갭을 측정하기 위한 장치들
VINTILA ADRIANA, SLEVIN DAMIEN MARTIN, ALDEN EMILY ANN, BAPAT SHRIRAM VASANT
Year of Publication 02.01.2024
Get full text
Year of Publication 02.01.2024
Patent
프로세싱 챔버 내의 기판의 고온 가열
LEE JAMES F, CONNER RAND ARTHUR, SHAIKH FAYAZ A, SLEVIN DAMIEN MARTIN, MUDROW MATTHEW
Year of Publication 07.12.2021
Get full text
Year of Publication 07.12.2021
Patent
APPARATUSES FOR MEASURING GAP BETWEEN A SUBSTRATE SUPPORT PLANE AND GAS DISTRIBUTION DEVICE
Alden, Emily Ann, Slevin, Damien Martin, Vintila, Adriana, Bapat, Shriram Vasant
Year of Publication 27.06.2024
Get full text
Year of Publication 27.06.2024
Patent
APPARATUSES FOR MEASURING GAP BETWEEN SUBSTRATE SUPPORT AND GAS DISTRIBUTION DEVICE
BAPAT, Shriram Vasant, VINTILA, Adriana, SLEVIN, Damien Martin, ALDEN, Emily Ann
Year of Publication 03.11.2022
Get full text
Year of Publication 03.11.2022
Patent
HIGH TEMPERATURE HEATING OF A SUBSTRATE IN A PROCESSING CHAMBER
LEE, James F, SHAIKH, Fayaz A, SLEVIN, Damien Martin, MUDROW, Matthew, CONNER, Rand Arthur
Year of Publication 23.06.2022
Get full text
Year of Publication 23.06.2022
Patent
MECHANICAL INDEXER FOR MULTI-STATION PROCESS MODULE
BLANK, Richard, SLEVIN, Damien Martin, SCULAC, Robert, LEESER, Karl Frederick, NORDIN, Michael
Year of Publication 14.10.2021
Get full text
Year of Publication 14.10.2021
Patent
CHEMICAL VAPOR DEPOSITION SHOWER HEAD FOR UNIFORM GAS DISTRIBUTION
MADSEN, Eric, SLEVIN, Damien Martin, BORTH, Andrew James, SELEP, Michael John, WILTSE, John Michael
Year of Publication 19.12.2019
Get full text
Year of Publication 19.12.2019
Patent
CHEMICAL VAPOR DEPOSITION SHOWER HEAD FOR UNIFORM GAS DISTRIBUTION
MADSEN, Eric, SLEVIN, Damien Martin, BORTH, Andrew James, SELEP, Michael John, WILTSE, John Michael
Year of Publication 12.12.2019
Get full text
Year of Publication 12.12.2019
Patent
Apparatus for measuring gap between substrate support and gas distribution device
VENTILA, ADRIANA, SLEVIN DAMIEN MARTIN, ALDEN EMILY ANN, BAPAT, SHRIRAM, VASANT
Year of Publication 07.03.2023
Get full text
Year of Publication 07.03.2023
Patent
Apparatuses for measuring gap between substrate support and gas distribution device
ALDEN, EMILY ANN, SLEVIN, DAMIEN MARTIN, BAPAT, SHRIRAM VASANT, VINTILA, ADRIANA
Year of Publication 01.02.2023
Get full text
Year of Publication 01.02.2023
Patent