Ultra-thin 3D Nano-Devices from Atomic Layer Deposition on Polyimide
Eigenfeld, Nathan T., Gray, Jason M., Brown, Joseph J., Skidmore, George D., George, Steven M., Bright, Victor M.
Published in Advanced materials (Weinheim) (18.06.2014)
Published in Advanced materials (Weinheim) (18.06.2014)
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Electrical and thermal conduction in ultra-thin freestanding atomic layer deposited W nanobridges
Eigenfeld, Nathan T, Gertsch, Jonas C, Skidmore, George D, George, Steven M, Bright, Victor M
Published in Nanoscale (14.11.2015)
Published in Nanoscale (14.11.2015)
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Micromachined end-effector and techniques for directed MEMS assembly
Tsui, Kenneth, Geisberger, Aaron A, Ellis, Matt, Skidmore, George D
Published in Journal of micromechanics and microengineering (01.04.2004)
Published in Journal of micromechanics and microengineering (01.04.2004)
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Electrothermal properties and modeling of polysilicon microthermal actuators
Geisberger, A.A., Sarkar, N., Ellis, M., Skidmore, G.D.
Published in Journal of microelectromechanical systems (01.08.2003)
Published in Journal of microelectromechanical systems (01.08.2003)
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Three-dimensional manipulation of carbon nanotubes under a scanning electron microscope
Yu, MinFeng, Dyer, Mark J, Skidmore, George D, Rohrs, Henry W, Lu, XueKun, Ausman, Kevin D, Ehr, James R Von, Ruoff, Rodney S
Published in Nanotechnology (01.09.1999)
Published in Nanotechnology (01.09.1999)
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A sub-micron metallic electrothermal gripper
Park, Daniel Sang-Won, Nallani, Arun Kumar, Cha, DonKyu, Lee, Gil-Sik, Kim, Moon J., Skidmore, George, Lee, Jeong-Bong, Lee, Jeong-Soo
Published in Microsystem technologies : sensors, actuators, systems integration (01.03.2010)
Published in Microsystem technologies : sensors, actuators, systems integration (01.03.2010)
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Layer-by-layer deposition of zirconium oxide films from aqueous solutions for friction reduction in silicon-based microelectromechanical system devices
Liu, Jun-Fu, Nistorica, Corina, Gory, Igor, Skidmore, George, Mantiziba, Fadziso M., Gnade, Bruce E.
Published in Thin solid films (01.12.2005)
Published in Thin solid films (01.12.2005)
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Electrical and thermal conduction in ultra-thin freestanding atomic layer deposited W nanobridgesElectronic supplementary information (ESI) available: This information outlines examples of thermal conductance measurements, thermal conductivity extraction, accuracy of the measurement method and thermal loss calculations and adjustments. Also, discussion of XRD film analysis and ALD grain size is included. See DOI: 10.1039/c5nr04885k
Eigenfeld, Nathan T, Gertsch, Jonas C, Skidmore, George D, George, Steven M, Bright, Victor M
Year of Publication 22.10.2015
Year of Publication 22.10.2015
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Localized magnetostrictive magnetization reversal using scanning probe tips
Schmidt, Jake, Foss, Sheryl, Skidmore, GeorgeD, Dan Dahlberg, E., Merton, Chris
Published in Journal of magnetism and magnetic materials (01.12.1998)
Published in Journal of magnetism and magnetic materials (01.12.1998)
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Conference Proceeding
Microscopic stress-induced magnetization changes in a fracture (1 1 1) surface of Terfenol-D observed with magnetic force microscopy
Schmidt, Jake, Tickle, Rob, Skidmore, George D., Merton, Chris, James, Richard D., Dan Dahlberg, E.
Published in Journal of magnetism and magnetic materials (01.12.1998)
Published in Journal of magnetism and magnetic materials (01.12.1998)
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De-tethering of high aspect ratio metallic and polymeric MEMS/NEMS parts for the direct pick-and-place assembly of 3D microsystem
Colinjivadi, Karthik S., Cui, Yonghao, Ellis, Matthew, Skidmore, George, Lee, Jeong-Bong
Published in Microsystem technologies (01.10.2008)
Published in Microsystem technologies (01.10.2008)
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Conference Proceeding
Atomic layer etching on microdevices and nanodevices
Bright, Victor M, Brown, Joseph J, Skidmore, George, George, Steven M, Gertsch, Jonas, Eigenfeld, Nathan Thomas
Year of Publication 31.01.2023
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Year of Publication 31.01.2023
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FIB Prepared TEM Sample Lift-out Using MEMS Grippers
Tuck, Kimberly, Ellis, Matthew, Geisberger, Aaron, Skidmore, George, Foster, Phil
Published in Microscopy and microanalysis (01.08.2004)
Published in Microscopy and microanalysis (01.08.2004)
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Demonstration of Pick and Place Assembly for Scaled MEMS Devices
Jeon, J, Gory, I, Skidmore, G, Kim, MJ, Gnade, BE
Published in Microscopy and microanalysis (01.08.2006)
Published in Microscopy and microanalysis (01.08.2006)
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Effect of Atomic Layer Etching on Residual Stress of Al2o3 Ald Ultra-Thin Film Suspended Structures
Sortino, Emanuele, Houlton, John P., Gertsch, Jonas C., Supekar, Omkar D., Skidmore, George D., George, Steven M., Rogers, Charles T., Bright, Victor M.
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01.06.2019)
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01.06.2019)
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Conference Proceeding
ATOMIC LAYER ETCHING ON MICRODEVICES AND NANODEVICES
GEORGE, Steven M, BROWN, Joseph J, SKIDMORE, George, EIGENFELD, Nathan Thomas, BRIGHT, Victor M, GERTSCH, Jonas
Year of Publication 08.10.2020
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Year of Publication 08.10.2020
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Exponential assembly
Skidmore, George D, Parker, Eric, Ellis, Matthew, Sarkar, Neil, Merkle, Ralph
Published in Nanotechnology (01.09.2001)
Published in Nanotechnology (01.09.2001)
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