Ultrathin epitaxial NbNx film deposited by PEALD method on C-plane sapphire: Growth, structure and superconducting properties
Shibalov, M.V., Sirotina, A.P., Pershina, E.A., Martovitskii, V.P., Shibalova, A.A., Mumlyakov, A.M., Trofimov, I.V., Timofeeva, E.R., Porokhov, N.V., Zenova, E.V., Tarkhov, M.A.
Published in Applied surface science (01.03.2023)
Published in Applied surface science (01.03.2023)
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CVD-growth of CNT with the use of catalutic Ct–Me–N–O thin films incorporated in the technology
Gromov, D. G., Bulyarskii, S. V., Dubkov, S. V., Pavlov, A. A., Skorik, S. N., Trifonov, A. Yu, Shulyat’ev, A. S., Shaman, Yu. P., Kitsyuk, E. P., Dudin, A. A., Sirotina, A. P., Gavrilov, S. A.
Published in Russian microelectronics (2017)
Published in Russian microelectronics (2017)
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