Freeze Drying of High Aspect Ratio Structures
Sirard, Steve, Limary, Ratchana, Patel, Mehul N., Hymes, Diane
Published in Solid state phenomena (01.09.2014)
Published in Solid state phenomena (01.09.2014)
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Journal Article
Low-k damage reduction using a modified plasma strip process
Mani, Rajesh, Ji, Bing, Sirard, Steve, Bailey, Andrew
Published in Solid state technology (01.05.2010)
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Published in Solid state technology (01.05.2010)
Magazine Article