MEMS switching of contour-mode aluminum nitride resonators for switchable and reconfigurable radio frequency filters
Nordquist, Christopher D, Branch, Darren W, Pluym, Tammy, Choi, Sukwon, Nguyen, Janet H, Grine, Alejandro, Dyck, Christopher W, Scott, Sean M, Sing, Molly N, Olsson, Roy H
Published in Journal of micromechanics and microengineering (01.10.2016)
Published in Journal of micromechanics and microengineering (01.10.2016)
Get full text
Journal Article
MEMS switching of contour-mode aluminum nitride resonators for switchable and reconfigurable radio frequency filters
Nordquist, Christopher D., Branch, Darren W., Pluym, Tammy, Choi, Sukwon, Nguyen, Janet H., Grine, Alejandro, Dyck, Christopher W., Scott, Sean M., Sing, Molly N., Olsson, III, Roy H.
Published in Journal of micromechanics and microengineering (31.08.2016)
Get full text
Published in Journal of micromechanics and microengineering (31.08.2016)
Journal Article