The effect of dose rate on ion implanted impurity profiles in silicon
Tian, S., Yang, S.-H., Morris, S., Parab, K., Tasch, A.F., Kamenitsa, D., Reece, R., Freer, B., Simonton, R.B., Magee, C.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.1996)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.1996)
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Journal Article
A technique for determining beam parallelism on a medium current implanter using the Therma-Wave Therma-Probe
Kamenitsa, D.E., Rathmell, R.D., McCoy, W.R., Lillian, P.K., King, M.L., Simonton, R.B.
Published in Proceedings of 11th International Conference on Ion Implantation Technology (1996)
Published in Proceedings of 11th International Conference on Ion Implantation Technology (1996)
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Conference Proceeding