Molecular Dynamics Simulation of Bubble Formation in Confined Water in Si/SiO2 Nanochannels
Taghavi Nasrabadi, Amir, Nishikido, Shuuichi, Simms, Ihsan, Nakamori, Mitsunori
Published in ECS transactions (27.09.2024)
Published in ECS transactions (27.09.2024)
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Journal Article
Molecular Dynamics Simulation of Bubble Formation in Confined Water in Si/SiO 2 Nanochannels
Taghavi Nasrabadi, Amir, Nishikido, Shuuichi, Simms, Ihsan, Nakamori, Mitsunori
Published in ECS transactions (27.09.2024)
Published in ECS transactions (27.09.2024)
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Journal Article
Investigating the Role of Fluid Dynamics on Cut Width Accuracy in Wet Bevel Cleaning Techniques
Dong, Rencheng, Fujita, Akira, Bassett, Derek, Shinohara, Kazuyoshi, Takahashi, Shuhei, Simms, Ihsan
Published in ECS transactions (27.09.2024)
Published in ECS transactions (27.09.2024)
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Journal Article
웨이퍼 조 촬상
MARUMOTO HIROSHI, ESTRELLA JOEL, SIMMS IHSAN, CARCASI MICHAEL, HOOGE JOSHUA
Year of Publication 20.02.2024
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Year of Publication 20.02.2024
Patent
배스 시스템 및 이의 방법
MARUMOTO HIROSHI, ESTRELLA JOEL, SIMMS IHSAN, ROTONDARO ANTONIO LUIS PACHECO, CARCASI MICHAEL, HOOGE JOSHUA
Year of Publication 13.02.2024
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Year of Publication 13.02.2024
Patent
UV-ASSISTED STRIPPING OF HARDENED PHOTORESIST TO CREATE CHEMICAL TEMPLATES FOR DIRECTED SELF-ASSEMBLY
NAFUS KATHLEEN, SIMMS IHSAN, SOMERVELL MARK, NEGREIRA AINHOA, BROWN IAN
Year of Publication 12.04.2021
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Year of Publication 12.04.2021
Patent
UV-ASSISTED STRIPPING OF HARDENED PHOTORESIST TO CREATE CHEMICAL TEMPLATES FOR DIRECTED SELF-ASSEMBLY
NAFUS KATHLEEN, SIMMS IHSAN, SOMERVELL MARK, NEGREIRA AINHOA, BROWN IAN
Year of Publication 12.04.2021
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Year of Publication 12.04.2021
Patent
(Invited) Wet Etching inside Advanced High Aspect Ratio Structures: Impact of Dissolved Oxygen
Sakazaki, Tetsuya, Kosugi, Hitoshi, Bassett, Derek W, Simms, Ihsan, Rotondaro, Antonio, Hurd, Trace
Published in ECS transactions (03.07.2019)
Published in ECS transactions (03.07.2019)
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Journal Article
Focus Spot Reduction by Brush Scrubber Cleaning
Pacco, Antoine, Vandereyken, Jelle, Nafus, Kathleen, Yonekawa, Hiroki, Kesters, Els, Simms, Ihsan
Published in Solid state phenomena (01.09.2014)
Published in Solid state phenomena (01.09.2014)
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Journal Article
UV-ASSISTED STRIPPING OF HARDENED PHOTORESIST TO CREATE CHEMICAL TEMPLATES FOR DIRECTED SELF-ASSEMBLY
NAFUS KATHLEEN, SIMMS IHSAN, SOMERVELL MARK, NEGREIRA AINHOA, BROWN IAN
Year of Publication 12.05.2016
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Year of Publication 12.05.2016
Patent
Integration of Wet Cleaning in 45 Nm Pitch BEOL Processing
Kesters, Els, Le, Quoc Toan, Lazzarino, Frederic, Decoster, Stefan, Wilson, Chris, Simms, Ihsan, Holsteyns, Frank, De Gendt, Stefan
Published in ECS transactions (31.08.2013)
Published in ECS transactions (31.08.2013)
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Journal Article
(Invited) Wetting Behavior of Aqueous Solutions on High Aspect Ratio Nanopillars with Hydrophilic Surface Finish
Vereecke, Guy, Xu, XiuMei, Tsai, Wei-Kang, Yang, Hui, Armini, Silvia, Delande, Tinne, Doumen, Geert, Kentie, Frank, Shi, Xiaoping, Simms, Ihsan, Nafus, Kathleen, Holsteyns, Frank, Struyf, Herbert, De Gendt, Stefan
Published in ECS transactions (31.08.2013)
Published in ECS transactions (31.08.2013)
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Journal Article
WAFER BATH IMAGING
Hooge, Joshua, Carcasi, Michael, Simms, Ihsan, Marumoto, Hiroshi, Estrella, Joel
Year of Publication 22.12.2022
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Year of Publication 22.12.2022
Patent
WAFER BATH IMAGING
MARUMOTO, Hiroshi, HOOGE, Joshua, SIMMS, Ihsan, ESTRELLA, Joel, CARCASI, Michael
Year of Publication 22.12.2022
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Year of Publication 22.12.2022
Patent
Bath Systems and Methods Thereof
Hooge, Joshua, Carcasi, Michael, Simms, Ihsan, Marumoto, Hiroshi, Rotondaro, Antonio Luis Pacheco, Estrella, Joel
Year of Publication 09.11.2023
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Year of Publication 09.11.2023
Patent
Bath systems and methods thereof
Hooge, Joshua, Carcasi, Michael, Simms, Ihsan, Marumoto, Hiroshi, Rotondaro, Antonio Luis Pacheco, Estrella, Joel
Year of Publication 29.08.2023
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Year of Publication 29.08.2023
Patent
UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assembly
Simms, Ihsan, Nafus, Kathleen, Somervell, Mark H, Brown, Ian J, Negreira, Ainhoa
Year of Publication 27.12.2022
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Year of Publication 27.12.2022
Patent
BATH SYSTEMS AND METHODS THEREOF
ROTONDARO, Antonio Luis Pacheco, MARUMOTO, Hiroshi, HOOGE, Joshua, SIMMS, Ihsan, ESTRELLA, Joel, CARCASI, Michael
Year of Publication 15.12.2022
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Year of Publication 15.12.2022
Patent