Investigation of microstructure and properties of magnetron sputtered Zr-Si-N thin films with different Si content
Silva Neto, P.C., Freitas, F.G.R., Fernandez, D.A.R., Carvalho, R.G., Felix, L.C., Terto, A.R., Hubler, R., Mendes, F.M.T., Silva Junior, A.H., Tentardini, E.K.
Published in Surface & coatings technology (15.11.2018)
Published in Surface & coatings technology (15.11.2018)
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