Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency control
Egorov, Konstantin V, Kuzmichev, Dmitry S, Sigarev, Andrey A, Myakota, Denis I, Zarubin, Sergey S, Chizov, Pavel S, Perevalov, Timofey V, Gritsenko, Vladimir A, Hwang, Cheol Seong, Markeev, Andrey M
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (2018)
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (2018)
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Journal Article
Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency controlElectronic supplementary information (ESI) available. See DOI: 10.1039/c8tc00679b
Egorov, Konstantin V, Kuzmichev, Dmitry S, Sigarev, Andrey A, Myakota, Denis I, Zarubin, Sergey S, Chizov, Pavel S, Perevalov, Timofey V, Gritsenko, Vladimir A, Hwang, Cheol Seong, Markeev, Andrey M
Year of Publication 20.09.2018
Year of Publication 20.09.2018
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Journal Article
Hydrogen radical enhanced atomic layer deposition of TaO x : saturation studies and methods for oxygen deficiency control
Egorov, Konstantin V., Kuzmichev, Dmitry S., Sigarev, Andrey A., Myakota, Denis I., Zarubin, Sergey S., Chizov, Pavel S., Perevalov, Timofey V., Gritsenko, Vladimir A., Hwang, Cheol Seong, Markeev, Andrey M.
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (2018)
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (2018)
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Journal Article
Characterization of nonstoichiometric silicon nitride PECVD/ALD films for IR micro-detectors array
Rudakov, Grigory A., Sigarev, Andrey A., Fedirko, Valeriy A., Fetisov, Evgeniy A.
Published in 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) (01.10.2016)
Published in 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) (01.10.2016)
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