Photolithography in the vacuum ultraviolet (172 nm) with sub-400 nm resolution: photoablative patterning of nanostructures and optical components in bulk polymers and thin films on semiconductors
Mironov, Andrey E, Kim, Jinhong, Huang, Yin, Steinforth, Austin W, Sievers, Dane J, Eden, J. Gary
Published in Nanoscale (28.08.2020)
Published in Nanoscale (28.08.2020)
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Journal Article
Monolithic radio frequency SiNx self-rolled-up nanomembrane interdigital capacitor modeling and fabrication
Sang, Lei, Zhou, Hao, Yang, Zhendong, Kraman, Mark D, Zhao, Haojie, Michaels, Julian A, Sievers, Dane J, Schutt-aine, Jose E, Li, Xiuling, Huang, Wen
Published in Nanotechnology (06.09.2019)
Published in Nanotechnology (06.09.2019)
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Journal Article
Monolithic radio frequency SiN x self-rolled-up nanomembrane interdigital capacitor modeling and fabrication
Sang, Lei, Zhou, Hao, Yang, Zhendong, Kraman, Mark D, Zhao, Haojie, Michaels, Julian A, Sievers, Dane J, Schutt-Aine, Jose E, Li, Xiuling, Huang, Wen
Published in Nanotechnology (06.09.2019)
Published in Nanotechnology (06.09.2019)
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Journal Article
Plasma‐Damage Free Efficiency Scaling of Micro‐LEDs by Metal‐Assisted Chemical Etching
Chan, Clarence Y., Roberts, Henry C., Xiao, Yixin, Froeter, Paul J., Sievers, Dane J., Mi, Zetian, Li, Xiuling
Published in Advanced optical materials (01.05.2024)
Published in Advanced optical materials (01.05.2024)
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Journal Article
Photoablative lithography of cellulose acetate at 172 nm: Subtractive 3D printing of biodegradable optical microstructures and molds for polydimethylsiloxane patterning
Mironov, Andrey E., Park, Sehyun, Kim, Jinhong, Sievers, Dane J., Park, Sung-Jin, Spirk, Stephan, Eden, J. Gary
Published in APL materials (01.11.2021)
Published in APL materials (01.11.2021)
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Journal Article
Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology
Huang, Wen, Yang, Zhendong, Kraman, Mark D, Wang, Qingyi, Ou, Zihao, Rojo, Miguel Muñoz, Yalamarthy, Ananth Saran, Chen, Victoria, Lian, Feifei, Ni, Jimmy H, Liu, Siyu, Yu, Haotian, Sang, Lei, Michaels, Julian, Sievers, Dane J, Eden, J Gary, Braun, Paul V, Chen, Qian, Gong, Songbin, Senesky, Debbie G, Pop, Eric, Li, Xiuling
Published in Science advances (17.01.2020)
Published in Science advances (17.01.2020)
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Journal Article
Arrays of Microplasma-assisted Atomic Layer Deposition and Etching Free Patterning of Ga2O3 Thin Film with Flexible DUV Photodetector
Kim, Jinhong, Mironov, Andrey E., Sievers, Dane J., Park, Sung-Jin, Eden, J. Gary
Published in 2021 Conference on Lasers and Electro-Optics (CLEO) (01.05.2021)
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Published in 2021 Conference on Lasers and Electro-Optics (CLEO) (01.05.2021)
Conference Proceeding
Logic function generation from single microplasma transistor devices and arrays of devices
LI BENBEN, EDEN J. GARY, WAGNER CLARK J, TCHERTCHIAN PAUL A, HOULAHAN THOMAS J, SIEVERS DANE J
Year of Publication 03.05.2016
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Year of Publication 03.05.2016
Patent
Hybrid plasma-semiconductor transistors, logic devices and arrays
LI BENBEN, EDEN J. GARY, WAGNER CLARK J, TCHERTCHIAN PAUL A, HOULAHAN THOMAS J, SIEVERS DANE J
Year of Publication 16.02.2016
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Year of Publication 16.02.2016
Patent
Flexible and on wafer hybrid plasma-semiconductor transistors
LI BENBEN, EDEN J. GARY, WAGNER CLARK J, TCHERTCHIAN PAUL A, HOULAHAN THOMAS J, SIEVERS DANE J
Year of Publication 10.11.2015
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Year of Publication 10.11.2015
Patent
LOGIC FUNCTION GENERATION FROM SINGLE MICROPLASMA TRANSISTOR DEVICES AND ARRAYS OF DEVICES
LI BENBEN, EDEN J. GARY, WAGNER CLARK J, TCHERTCHIAN PAUL A, HOULAHAN THOMAS J, SIEVERS DANE J
Year of Publication 15.10.2015
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Year of Publication 15.10.2015
Patent
HYBRID PLASMA-SEMICONDUCTOR TRANSISTORS, LOGIC DEVICES AND ARRAYS
LI BENBEN, EDEN J. GARY, WAGNER CLARK J, TCHERTCHIAN PAUL A, HOULAHAN THOMAS J, SIEVERS DANE J
Year of Publication 20.11.2014
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Year of Publication 20.11.2014
Patent
FLEXIBLE AND ON WAFER HYBRID PLASMA-SEMICONDUCTOR TRANSISTORS
LI BENBEN, EDEN J. GARY, WAGNER CLARK J, TCHERTCHIAN PAUL A, HOULAHAN THOMAS J, SIEVERS DANE J
Year of Publication 30.10.2014
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Year of Publication 30.10.2014
Patent