SiGe epitaxy on a 300 mm batch furnace
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Published in Journal of nanoscience and nanotechnology (01.09.2011)
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Journal Article
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Published in Surface & coatings technology (01.07.2001)
Published in Surface & coatings technology (01.07.2001)
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Journal Article
Synthesis of metal nitrides by low-energy ion assisted film growth
RAUSCHENBACH, Bernd, SIENZ, Stefan, SIX, Stephan, GERLACH, Jürgen W
Published in Surface & coatings technology (2001)
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Published in Surface & coatings technology (2001)
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