In situ stress measurements during low-energy nitriding of stainless steel
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Comparison of ion-beam-assisted molecular beam epitaxy with conventional molecular beam epitaxy of thin hexagonal gallium nitride films
Sienz, S, Gerlach, J.W, Höche, T, Sidorenko, A, Mayerhöfer, T.G, Benndorf, G, Rauschenbach, B
Published in Journal of crystal growth (15.03.2004)
Published in Journal of crystal growth (15.03.2004)
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Ion-beam-assisted molecular-beam epitaxy: a method to deposit gallium nitride films with high crystalline quality
Sienz, S., Gerlach, J.W., Höche, T., Sidorenko, A., Rauschenbach, B.
Published in Thin solid films (30.06.2004)
Published in Thin solid films (30.06.2004)
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In-situ stress measurement during the ion implantation-induced doping of gallium nitride
Sienz, S, Rauschenbach, B, Wenzel, A, Lell, A, Bader, S, Härle, V
Published in Thin solid films (01.08.2002)
Published in Thin solid films (01.08.2002)
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Influence of defects in low-energy nitrogen ion beam assisted gallium nitride thin film deposition
Gerlach, J.W., Sienz, S., Attenberger, W., Rauschenbach, B.
Published in Physica. B, Condensed matter (01.12.2001)
Published in Physica. B, Condensed matter (01.12.2001)
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In situ stress analysis of boron nitride films prepared by ion beam assisted deposition
Zeitler, M, Sienz, S, Neumann, H, Zeuner, M, Gerlach, J.W, Rauschenbach, B
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.1998)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.1998)
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Synthesis of metal nitrides by low-energy ion assisted film growth
Rauschenbach, Bernd, Sienz, Stefan, Six, Stephan, Gerlach, Jürgen W
Published in Surface & coatings technology (01.07.2001)
Published in Surface & coatings technology (01.07.2001)
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Journal Article
Influence of defects in low-energy nitrogen ion beam assisted gallium nitride thin film deposition
GERLACH, J. W, SIENZ, S, ATTENBERGER, W, RAUSCHENBACH, B
Published in Physica. B, Condensed matter (2001)
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Published in Physica. B, Condensed matter (2001)
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