Toward accurate characterization of nitrogen depth profiles in ultrathin oxynitride films
Jiang, Z. X., Kim, K., Sieloff, D. D., Luo, T. Y., Varghese, A., Triyoso, D. H., Guenther, T., Robichaud, B., Benavides, J.
Published in Surface and interface analysis (01.10.2008)
Published in Surface and interface analysis (01.10.2008)
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Characterization of HfO2 dielectric films with low energy SIMS
JIANG, Z. X, KIM, K, LERMA, J, SIELOFF, D, TSENG, H, HEGDE, R. I, LUO, T. Y, YANG, J. Y, TRIYOSO, D. H, TOBIN, P. J
Published in Applied surface science (30.07.2006)
Published in Applied surface science (30.07.2006)
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Conference Proceeding
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Quantitative SIMS analysis of SiGe composition with low energy O2+ beams
JIANG, Z. X, KIM, K, LERMA, J, CORBETT, A, SIELOFF, D, KOTTKE, M, GREGORY, R, SCHAUER, S
Published in Applied surface science (01.07.2006)
Published in Applied surface science (01.07.2006)
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Conference Proceeding
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Studies of point defect/dislocation loop interaction processes in silicon
Jones, K.S., Robinson, H.G., Listebarger, J., Chen, J., Liu, J., Herner, B., Park, H., Law, M.E., Sieloff, D., Slinkman, J.A.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.03.1995)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.03.1995)
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Journal Article
Quantitative SIMS analysis of SiGe composition with low energy O 2 + beams
Jiang, Z.X., Kim, K., Lerma, J., Corbett, A., Sieloff, D., Kottke, M., Gregory, R., Schauer, S.
Published in Applied surface science (30.07.2006)
Published in Applied surface science (30.07.2006)
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Journal Article
Characterization of HfO 2 dielectric films with low energy SIMS
Jiang, Z.X., Kim, K., Lerma, J., Sieloff, D., Tseng, H., Hegde, R.I., Luo, T.Y., Yang, J.Y., Triyoso, D.H., Tobin, P.J.
Published in Applied surface science (30.07.2006)
Published in Applied surface science (30.07.2006)
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Monte Carlo simulation of heavy species (Indium and Germanium) ion implantation into silicon
Chen, Y., Obradovic, B., Morris, M., Wang, G., Balamurugan, G., Li, D., Tasch, A. F., Kamenitsa, D., McCoy, W., Baumann, S., Bleier, R., Sieloff, D., Dyer, D., Zeitzoff, P.
Published in Journal of technology computer aided design (1996)
Published in Journal of technology computer aided design (1996)
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Journal Article
Processes for testing a region for an analyte and a process for forming an electronic device
HUES STEVEN M, FAKHREDDINE HASSAN F, SIELOFF DAVID D, LOVEJOY MICHAEL L
Year of Publication 05.05.2009
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Year of Publication 05.05.2009
Patent
Processes for testing a region for an analyte and a process for forming an electronic device
Hues, Steven M, Fakhreddine, Hassan F, Lovejoy, Michael L, Sieloff, David D
Year of Publication 05.05.2009
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Year of Publication 05.05.2009
Patent
PROCESS FOR TESTING A REGION FOR AN ANALYTE AND A PROCESS FOR FORMING AN ELECTRONIC DEVICE
LOVEJOY, MICHAEL L, FAKHREDDINE, HASSAN F, HUES, STEVEN M, SIELOFF, DAVID D
Year of Publication 18.10.2007
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Year of Publication 18.10.2007
Patent
PROCESS FOR TESTING A REGION FOR AN ANALYTE AND A PROCESS FOR FORMING AN ELECTRONIC DEVICE
LOVEJOY, MICHAEL L, FAKHREDDINE, HASSAN F, HUES, STEVEN M, SIELOFF, DAVID D
Year of Publication 31.08.2006
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Year of Publication 31.08.2006
Patent
Processes for testing a region for an analyte and a process for forming an electronic device
HUES STEVEN M, FAKHREDDINE HASSAN F, SIELOFF DAVID D, LOVEJOY MICHAEL L
Year of Publication 24.08.2006
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Year of Publication 24.08.2006
Patent