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Year of Publication 27.06.2024
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RECONFIGURABLE MAINFRAME WITH REPLACEABLE INTERFACE PLATE HAVING REPLACEABLE CHAMBER PORTS
Kuchar, Michael C, Sico, Angela Rose, Koshti, Sushant S, Morey, Travis
Year of Publication 27.06.2024
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Year of Publication 27.06.2024
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Year of Publication 21.05.2024
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Year of Publication 21.05.2024
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MAINFRAME OF SUBSTRATE PROCESSING SYSTEM WITH INTEGRATED LID
MOREY, TRAVIS, WYATT, ADAM J, MCANDREW, ROBERT M, SICO, ANGELA ROSE, KOSHTI, SUSHANT S, AMIR, OFER, RICE, MICHAEL R, KUCHAR, MICHAEL C
Year of Publication 21.05.2024
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Year of Publication 21.05.2024
Patent
MAINFRAME OF SUBSTRATE PROCESSING SYSTEM WITH INTEGRATED LID
MOREY, TRAVIS, WYATT, ADAM J, MCANDREW, ROBERT M, SICO, ANGELA ROSE, KOSHTI, SUSHANT S, AMIR, OFER, RICE, MICHAEL R, KUCHAR, MICHAEL C
Year of Publication 11.02.2024
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Year of Publication 11.02.2024
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