Optimum technique of depositing high-rate films by normal PCVD method
Xuanying Lin, Kuixun Lin, Yumpeng Yu, Lam, Y.W., Chan, Y.C., Shunhui Lin, Chan, Y.M.
Published in Proceedings of 1994 IEEE 1st World Conference on Photovoltaic Energy Conversion - WCPEC (A Joint Conference of PVSC, PVSEC and PSEC) (1994)
Published in Proceedings of 1994 IEEE 1st World Conference on Photovoltaic Energy Conversion - WCPEC (A Joint Conference of PVSC, PVSEC and PSEC) (1994)
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Conference Proceeding
Structure character of fast growth polycrystalline silicon film from SiCl/sub 4//H/sub 2
Rui Huang, Xuanying Lin, Yunpeng Yu, Kuixun Lin, Junhong Wei, Shunhui Lin, Chuying Yu
Published in Conference Record of the Thirty-first IEEE Photovoltaic Specialists Conference, 2005 (2005)
Published in Conference Record of the Thirty-first IEEE Photovoltaic Specialists Conference, 2005 (2005)
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Conference Proceeding
Electrical characteristics of fluorine implanted a-Si:H thin films at high fields
Ke, N., Wong, S.P., Peng, Shaoqi, Lin, Shunhui
Published in Materials chemistry and physics (01.10.1996)
Published in Materials chemistry and physics (01.10.1996)
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Journal Article