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"Shu, Tonny"
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"Shu, Tonny"
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Plasma chamber with erosion resistive securement screws
by
Lee, Ray C
,
Pang, Te-Hsun
,
Shu
,
Tonny
,
Lee, Birdson
Year of Publication
30.04.2002
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Plasmakammer mit erosionsresistenten Halteschrauben
by
PANG, TE-HSUN
,
SHU
,
TONNY
,
LEE, BIRDSON
,
LEE, RAY CHINGREAN
Year of Publication
21.10.2004
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Plasma chamber with erosion resistive securement screws
by
SHU TONNY
,
LEE BIRDSON
,
LEE RAY C
,
PANG TE-HSUN
Year of Publication
30.04.2002
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Plasma treatment unit for wafers employs polyimide screws with raised heads avoiding sharp contours to reduce charge concentrations, minimize erosion and increase screw life
by
PANG, TE-HSUN
,
SHU
,
TONNY
,
LEE, BIRDSON
,
LEE, RAY CHINGREAN
Year of Publication
15.06.2000
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