Uniformity optimization techniques for rapid thermal processing systems
Acharya, N., Kirtikar, V., Shooshtarian, S., Hong Doan, Timans, P.J., Balakrishnan, K.S., Knutson, K.L.
Published in IEEE transactions on semiconductor manufacturing (01.08.2001)
Published in IEEE transactions on semiconductor manufacturing (01.08.2001)
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