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Year of Publication 22.08.2013
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Synchronized radio frequency pulsing for plasma etching
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Year of Publication 16.04.2017
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SYNCHRONIZED RADIO FREQUENCY PULSING FOR PLASMA ETCHING
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Year of Publication 10.02.2011
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Year of Publication 20.10.2011
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Year of Publication 20.10.2011
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FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS
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Year of Publication 04.08.2011
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Year of Publication 04.08.2011
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FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS
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Year of Publication 04.08.2011
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Year of Publication 04.08.2011
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Feedforward temperature control for plasma processing apparatus
MERRY WALTER R, MAHADESWARASWAMY CHETAN, MAYS BRAD L, SHOJI SERGIO FUKUDA, TSONG TINA, NEVIL SHANE C, BUCHBERGER DOUGLAS A. JR, RAMASWAMY KARTIK, PATTAR YASHASWINI, NGUYEN DUY D, ZHANG CHUNLEI, NOORBAKHSH HAMI, SILVEIRA FERNANDO M
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Year of Publication 17.10.2012
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Feedforward temperature control for plasma processing apparatus
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Year of Publication 01.12.2011
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