Short-period multilayer X-ray mirrors
Andreev, S. S., Bibishkin, M. S., Chkhalo, N. I., Kluenkov, E. B., Prokhorov, K. A., Salashchenko, N. N., Zorina, M. V., Schafers, F., Shmaenok, L. A.
Published in Journal of synchrotron radiation (01.09.2003)
Published in Journal of synchrotron radiation (01.09.2003)
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Journal Article
Gas-Monitor Detector for Intense and Pulsed VUV/EUV Free-Electron Laser Radiation
Sorokin, A A, Bobashev, S V, Feldhaus, J, Gerth, Ch, Gottwald, A, Hahn, U, Kroth, U, Richter, M, Shmaenok, L A, Steeg, B, Tiedtke, K, Treusch, R
Published in AIP conference proceedings (12.05.2004)
Published in AIP conference proceedings (12.05.2004)
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Journal Article
Extreme Ultraviolet Spectroscopy of a Laser Plasma Source for Lithography
Shevelko, A P, Shmaenok, L A, Churilov, S S, Bastiaensen, R K F J, Bijkerk, F
Published in Physica scripta (01.02.1998)
Published in Physica scripta (01.02.1998)
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Journal Article
A high-power, low-contamination laser plasma source for Extreme UV lithography
Bijkerk, F., Shmaenok, L.A., Shevelko, A.P., Bastiaensen, R.K.F.J., Bruineman, C., van Honk, A.G.J.R.
Published in Microelectronic engineering (01.02.1995)
Published in Microelectronic engineering (01.02.1995)
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Journal Article
Conference Proceeding
Extreme UV lithography: A new laser plasma target concept and fabrication of multilayer reflection masks
Bijkerk, F., Shmaenok, L.A., Louis, E., Voorma, H.J., Koster, N.B., Bruineman, C., Bastiaensen, R.K.F.J., van der Drift, E.W.J.M., Romijn, J., de Groot, L.E.M., Rousseeuw, B.A.C., Zijlstra, T., Platonov, Yu.Ya, Salashchenko, N.N.
Published in Microelectronic engineering (01.01.1996)
Published in Microelectronic engineering (01.01.1996)
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Journal Article
Conference Proceeding
Absolute photometry of pulsed intense fluxes of ultrasoft X-ray radiation
Bobashev, S V, Golubev, A V, Platonov, Yu Ya, Salashchenko, N N, Shmaenok, L A, Volkov, G S, Zaitsev, V I
Published in Physica scripta (01.04.1991)
Published in Physica scripta (01.04.1991)
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Journal Article
Multilayer dispersion optics for X-ray radiation
Andreev, S.S, Mertins, H.-Ch, Platonov, Yu.Ya, Salashchenko, N.N, Schaefers, F, Shamov, E.A, Shmaenok, L.A
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (21.06.2000)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (21.06.2000)
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Journal Article
Multilayered mirrors based on La/B4C(B9C) for X-ray range near anomalous dispersion of boron (λ≈6.7nm)
Andreev, S.S., Barysheva, M.M., Chkhalo, N.I., Gusev, S.A., Pestov, A.E., Polkovnikov, V.N, Salashchenko, N.N., Shmaenok, L.A., Vainer, Yu.A., Zuev, S.Yu
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (11.05.2009)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (11.05.2009)
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Journal Article
Development of low-energy X-ray fluorescence micro-distribution analysis using a laser plasma X-ray source and multilayer optics
STUIK, R, SHMAENOK, L. A, FLEDDERUS, H, ANDREEV, S. S, SHAMOV, E. A, ZUEV, S. Yu, SALASHCHENKO, N. N, BIJKERK, F
Published in Journal of analytical atomic spectrometry (1999)
Published in Journal of analytical atomic spectrometry (1999)
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Conference Proceeding
Journal Article
Demonstration of Laser Induced X-Ray Generation in an Expanding Laser Produced Plasma
Simanovskii, DM, Gladskikh, AN, Shmaenok, LA, Bobashev, SV
Published in Physical review letters (29.07.1996)
Published in Physical review letters (29.07.1996)
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Journal Article
Multilayer EUV/X-ray polychromators for plasma diagnostics
Shmaenok, L.A., Platonov, Yu.Ya, Salashchenko, N.N., Sorokin, A.A., Simanovskii, D.M., Golubev, A.V., Belik, V.P., Bobashev, S.V., Bijkerk, F., Louis, E., Meijer, F.G., Etlicher, B., Grudsky, A.Ya
Published in Journal of electron spectroscopy and related phenomena (01.05.1996)
Published in Journal of electron spectroscopy and related phenomena (01.05.1996)
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Journal Article
Comparative heat load testing of freestanding multilayer Mo/ZrSi2 and Mo/NbSi2
Drozdov, M. N., Kluenkov, E. B., Lopatin, A. Ya, Luchin, V. I., Pestov, A. E., Salashchenko, N. N., Tsybin, N. N., Chkhalo, N. I., Shmaenok, L. A.
Published in Bulletin of the Russian Academy of Sciences. Physics (2013)
Published in Bulletin of the Russian Academy of Sciences. Physics (2013)
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Journal Article
Thermal stability of a freestanding EUV filter under long-term vacuum annealing at 700–1000°C
Gusev, S. A., Drozdov, M. N., Kluenkov, E. B., Lopatin, A. Ya, Luchin, V. I., Pariev, D. E., Pestov, A. E., Salashchenko, N. N., Tsybin, N. N., Chkhalo, N. I., Shmaenok, L. A.
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.05.2012)
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.05.2012)
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Journal Article
Evolution of elemental distribution in free-standing structures of Zr/ZrSi2 with MoSi2 and ZrSi2 protective coatings under annealing
Drozdov, M. N., Drozdov, Yu. N., Kluenkov, E. B., Lopatin, A. Ya, Luchin, V. I., Salashchenko, N. N., Tsybin, N. N., Shmaenok, L. A.
Published in Bulletin of the Russian Academy of Sciences. Physics (2011)
Published in Bulletin of the Russian Academy of Sciences. Physics (2011)
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Journal Article
Mo-based EUV multilayer filters with enhanced thermal stability
Drozdov, M. N., Kluenkov, E. B., Lopatin, A. Ya, Luchin, V. I., Pestov, A. E., Salashchenko, N. N., Tsybin, N. N., Chkhalo, N. I., Shmaenok, L. A.
Published in Bulletin of the Russian Academy of Sciences. Physics (2011)
Published in Bulletin of the Russian Academy of Sciences. Physics (2011)
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Journal Article
SIMS study of annealing effect on element distribution in free-standing Al/Si and Zr/ZrSi2 multilayer films
Drozdov, M. N., Drozdov, Yu. N., Kluenkov, E. B., Luchin, V. I., Lopatin, A. Ya, Salashchenko, N. N., Tsybin, N. N., Shmaenok, L. A.
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.06.2010)
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.06.2010)
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Journal Article
Spectroscopical diagnostics of alpha particles in the TSP tokamak
Belik, V. P., Simanovskaya, N. B., Shmaenok, L. A.
Published in Journal of applied spectroscopy (01.06.1991)
Published in Journal of applied spectroscopy (01.06.1991)
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Journal Article