Quantification and IMFP determination of multilayer Langmuir-Blodgett films by AFM and XPS measurements
Sato, Masahide, Tsukamoto, Naoto, Shiratori, Tsubasa, Furusawa, Takeshi, Suzuki, Noboru, Tougaard, Sven
Published in Surface and interface analysis (01.04.2006)
Published in Surface and interface analysis (01.04.2006)
Get full text
Journal Article
Conference Proceeding
Method of forming material layer semiconductor device and method of manufacturing the same
KIM JAE WOON, KIM HAE RYONG, KIM YOUN SOO, SHIRATORI TSUBASA, LEE JIN HO
Year of Publication 06.01.2022
Get full text
Year of Publication 06.01.2022
Patent
COMPOSITION FOR MANUFACTURING THIN FILM AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
CHO YOUN JOUNG, KIM JAE WOON, SUNG MIN JAE, YOSHII TAKAHIRO, SATO HARUYOSHI, PARK GYU HEE, RYU SEUNG MIN, SAITO KAZUYA, SHIRATORI TSUBASA, KIMURA MASAYUKI
Year of Publication 14.07.2023
Get full text
Year of Publication 14.07.2023
Patent
Lanthanum compound and methods of forming thin film and integrated circuit device
LIM JAE SOON, CHO YOUN JOUNG, YAMADA NAOKI, KIM YOUN SOO, HARANO KAZUKI, SATO HARUYOSHI, PARK GYU HEE, SHIRATORI TSUBASA
Year of Publication 25.09.2019
Get full text
Year of Publication 25.09.2019
Patent
TUNGSTEN PRECURSOR AND METHOD OF FORMING TUNGSTEN-CONTAINING LAYER USING THE SAME
AOKI YUTARO, LIM JAE-SOON, YUN JI EUN, SHIRATORI TSUBASA, SAITO AKIO, LEE SO YOUNG
Year of Publication 10.01.2019
Get full text
Year of Publication 10.01.2019
Patent
Tungsten precursor and Method of forming a tungsten-containing layer using the same
AOKI YUTARO, YUN, JI EUN, SHIRATORI TSUBASA, SAITO AKIO, LEE, SO YOUNG, LIM, JAE SOON
Year of Publication 27.12.2018
Get full text
Year of Publication 27.12.2018
Patent
Tantalum compound and methods of forming thin film and integrated circuit device
YAMADA NAOKI, KOIDE TAKANORI, SHIRATORI TSUBASA, RYU, SEUNG MIN, CHO, YOUN JOUNG, LIM, JAE SOON
Year of Publication 29.06.2017
Get full text
Year of Publication 29.06.2017
Patent