Resistivity anisotropy of nickel films induced by oblique incidence sputter deposition
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Journal Article
Conference Proceeding
Internal stress in sputter-deposited Al 2O 3 films
Shinzato, Sukehiro, Sumomogi, Tsunetaka, Kofune, Shigeo, Kuwahara, Kaizo
Published in Thin solid films (1982)
Published in Thin solid films (1982)
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Journal Article
Internal stress in sputter-deposited Al2O3 films
Shinzato, Sukehiro, Sumomogi, Tsunetaka, Kofune, Shigeo, Kuwahara, Kaizo
Published in Thin solid films (26.11.1982)
Published in Thin solid films (26.11.1982)
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Journal Article