A proposal of new concept milli-second annealing: Flexibly-shaped-pulse flash lamp annealing (FSP-FLA) for fabrication of ultra shallow junction with improvement of metal gate high-k CMOS performance
Onizawa, T., Shinich Kato, Aoyama, T., Yasuo Nara, Yuzuru Ohji
Published in 2008 Symposium on VLSI Technology (01.06.2008)
Published in 2008 Symposium on VLSI Technology (01.06.2008)
Get full text
Conference Proceeding