Global standardization of scanning probe microscopy
Fujita, Daisuke, Itoh, Hiroshi, Ichimura, Shingo, Kurosawa, Tomizo
Published in Nanotechnology (28.02.2007)
Published in Nanotechnology (28.02.2007)
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Journal Article
Characteristics of a charged-droplet beam generated by vacuum electrospray of an ionic liquid
Fujiwara, Yukio, Saito, Naoaki, Nonaka, Hidehiko, Nakanaga, Taisuke, Ichimura, Shingo
Published in Chemical physics letters (07.01.2011)
Published in Chemical physics letters (07.01.2011)
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Journal Article
Emission characteristics of a charged-droplet beam source using vacuum electrospray of an ionic liquid
Fujiwara, Yukio, Saito, Naoaki, Nonaka, Hidehiko, Ichimura, Shingo
Published in Surface and interface analysis (01.01.2013)
Published in Surface and interface analysis (01.01.2013)
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Journal Article
Conference Proceeding
A new cluster-ion-beam source for secondary ion mass spectrometry (SIMS) using the electrospray of a pure ionic liquid under high vacuum
Fujiwara, Yukio, Saito, Naoaki, Nonaka, Hidehiko, Nakanaga, Taisuke, Ichimura, Shingo
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.06.2010)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.06.2010)
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Journal Article
Characterizing atomic force microscopy tip shape in use
Wang, Chunmei, Itoh, Hiroshi, Sun, Jielin, Hu, Jun, Shen, Dianhong, Ichimura, Shingo
Published in Journal of nanoscience and nanotechnology (01.02.2009)
Published in Journal of nanoscience and nanotechnology (01.02.2009)
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Journal Article
Time-of-Flight secondary ion mass spectrometry (TOF-SIMS) using the metal-cluster-complex primary ion of Ir4(CO)7
Fujiwara, Yukio, Saito, Naoaki, Nonaka, Hidehiko, Suzuki, Atsushi, Nakanaga, Taisuke, Fujimoto, Toshiyuki, Kurokawa, Akira, Ichimura, Shingo
Published in Surface and interface analysis (01.01.2011)
Published in Surface and interface analysis (01.01.2011)
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Journal Article
Conference Proceeding
Metal cluster complex primary ion beam source for secondary ion mass spectrometry (SIMS)
Fujiwara, Yukio, Watanabe, Kouji, Nonaka, Hidehiko, Saito, Naoaki, Suzuki, Atsushi, Fujimoto, Toshiyuki, Kurokawa, Akira, Ichimura, Shingo
Published in Vacuum (10.12.2009)
Published in Vacuum (10.12.2009)
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Journal Article
Low-Temperature Oxidation of Silicon using UV-Light-Excited Ozone
Tosaka, Aki, Nishiguchi, Tetsuya, Nonaka, Hidehiko, Ichimura, Shingo
Published in Japanese Journal of Applied Physics (01.01.2005)
Published in Japanese Journal of Applied Physics (01.01.2005)
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Journal Article
Evaluation of Outermost Surface Temperature of Silicon Substrates during UV-Excited Ozone Oxidation at Low Temperature
KAMEDA, Naoto, NISHIGUCHI, Tetsuya, MORIKAWA, Yoshiki, KEKURA, Mitsuru, NAKAMURA, Ken, USHIYAMA, Tomoharu, NONAKA, Hidehiko, ICHIMURA, Shingo
Published in Analytical Sciences (2010)
Published in Analytical Sciences (2010)
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Journal Article
Rapid Oxidation of Silicon Using UV-Light Irradiation in Low-Pressure, Highly Concentrated Ozone Gas below 300 °C
Nishiguchi, Tetsuya, Saitoh, Shigeru, Kameda, Naoto, Morikawa, Yoshiki, Kekura, Mitsuru, Nonaka, Hidehiko, Ichimura, Shingo
Published in Japanese Journal of Applied Physics (01.05.2007)
Published in Japanese Journal of Applied Physics (01.05.2007)
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Journal Article
Etching-enhanced surface stress relaxation during initial ozone oxidation
Narushima, Tetsuya, Kitajima, Masahiro, Itakura, Akiko N., Kurokawa, Akira, Ichimura, Shingo, Miki, Kazushi
Published in Surface science (01.03.2007)
Published in Surface science (01.03.2007)
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Journal Article
AFM Tip Characterizer fabricated by Si/SiO2 multilayers
Takenaka, Hisataka, Hatayama, Masatoshi, Ito, Hisashi, Ohchi, Tadayuki, Takano, Akio, Kurosawa, Satoru, Itoh, Hiroshi, Ichimura, Shingo
Published in E-journal of surface science and nanotechnology (01.01.2011)
Published in E-journal of surface science and nanotechnology (01.01.2011)
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Journal Article
Characteristics of a cluster-ion beam of Os3(CO)n+ (n = 7 or 8) for low-damage sputtering
Fujiwara, Yukio, Kondou, Kouji, Teranishi, Yoshikazu, Nonaka, Hidehiko, Fujimoto, Toshiyuki, Kurokawa, Akira, Ichimura, Shingo, Tomita, Mitsuhiro
Published in Surface and interface analysis (01.12.2006)
Published in Surface and interface analysis (01.12.2006)
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Journal Article
Conference Proceeding
Secondary Ion Mass Spectrometry of Organic Thin Films Using Metal-Cluster-Complex Ion Source
Fujiwara, Yukio, Kondou, Kouji, Nonaka, Hidehiko, Saito, Naoaki, Itoh, Hiroshi, Fujimoto, Toshiyuki, Kurokawa, Akira, Ichimura, Shingo, Tomita, Mitsuhiro
Published in Japanese Journal of Applied Physics (01.09.2006)
Published in Japanese Journal of Applied Physics (01.09.2006)
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Journal Article