Forming edge etch protection using dual layer of positive-negative tone resists
Liu, Joyce C, Brown, Darius, Wiltshire, Timothy J, Kaplan, Richard D, Shing, Christopher B
Year of Publication 09.10.2018
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Year of Publication 09.10.2018
Patent
FORMING EDGE ETCH PROTECTION USING DUAL LAYER OF POSITIVE-NEGATIVE TONE RESISTS
LIU JOYCE C, BROWN DARIUS, SHING CHRISTOPHER B, KAPLAN RICHARD D, WILTSHIRE TIMOTHY J
Year of Publication 08.03.2018
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Year of Publication 08.03.2018
Patent