Spin-on silicon-nitride Films for Photo-lithography by RT Cure of Polysilazane
Shinde, Ninado, Takano, Yusuke, Sagan, John, Monreal, Victor, Nagahara, Tatsuro
Published in Journal of Photopolymer Science and Technology (01.01.2010)
Published in Journal of Photopolymer Science and Technology (01.01.2010)
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