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Transmission line RF applicator for plasma chamber
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Year of Publication 14.11.2017
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Transmission Line RF Applicator for Plasma Chamber
ANWAR SUHAIL, TRUONG DOUGLAS D, CHO SEON-MEE, SHINDE RANJIT INDRAJIT, SORENSEN CARL A, TANAKA TSUTOMU, KUDELA JOZEF, WHITE JOHN M
Year of Publication 26.11.2015
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Year of Publication 26.11.2015
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Transmission line RF applicator for plasma chamber
ANWAR SUHAIL, TRUONG DOUGLAS D, CHO SEON-MEE, SHINDE RANJIT INDRAJIT, SORENSEN CARL A, TANAKA TSUTOMU, KUDELA JOZEF, WHITE JOHN M
Year of Publication 02.06.2015
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Year of Publication 02.06.2015
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Transmission line RF applicator for plasma chamber
ANWAR SUHAIL, TRUONG DOUGLAS D, CHO SEON-MEE, SHINDE RANJIT INDRAJIT, SORENSEN CARL A, TANAKA TSUTOMU, KUDELA JOZEF, WHITE JOHN M
Year of Publication 14.04.2020
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Year of Publication 14.04.2020
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Transmission line RF applicator for plasma chamber
ANWAR SUHAIL, TRUONG DOUGLAS D, CHO SEON-MEE, SHINDE RANJIT INDRAJIT, SORENSEN CARL A, TANAKA TSUTOMU, KUDELA JOZEF, WHITE JOHN M
Year of Publication 29.08.2013
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Year of Publication 29.08.2013
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TRANSMISSION LINE RF APPLICATOR FOR PLASMA CHAMBER
WHITE, JOHN, M, TANAKA, TSUTOMU, SHINDE, RANJIT, INDRAJIT, SORENSEN, CARL, A, KUDELA, JOZEF, CHO, SEON-MEE, ANWAR, SUHAIL, TRUONG, DOUGLAS, D
Year of Publication 14.03.2013
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Year of Publication 14.03.2013
Patent
TRANSMISSION LINE RF APPLICATOR FOR PLASMA CHAMBER
WHITE, JOHN, M, TANAKA, TSUTOMU, SHINDE, RANJIT, INDRAJIT, SORENSEN, CARL, A, KUDELA, JOZEF, CHO, SEON-MEE, ANWAR, SUHAIL, TRUONG, DOUGLAS, D
Year of Publication 27.12.2012
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Year of Publication 27.12.2012
Patent
Transmission Line RF Applicator for Plasma Chamber
ANWAR SUHAIL, TRUONG DOUGLAS D, CHO SEON-MEE, SHINDE RANJIT INDRAJIT, SORENSEN CARL A, TANAKA TSUTOMU, KUDELA JOZEF, WHITE JOHN M
Year of Publication 27.12.2012
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Year of Publication 27.12.2012
Patent
Transmission line RF applicator for plasma chamber
ANWAR SUHAIL, TRUONG DOUGLAS D, CHO SEON-MEE, SHINDE RANJIT INDRAJIT, SORENSEN CARL A, TANAKA TSUTOMU, KUDELA JOZEF, WHITE JOHN M
Year of Publication 08.05.2018
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Year of Publication 08.05.2018
Patent
Transmission line RF applicator for plasma chamber
ANWAR SUHAIL, TRUONG DOUGLAS D, CHO SEON-MEE, SHINDE RANJIT INDRAJIT, SORENSEN CARL A, TANAKA TSUTOMU, KUDELA JOZEF, WHITE JOHN M
Year of Publication 27.03.2018
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Year of Publication 27.03.2018
Patent
Transmission line RF applicator for plasma chamber
ANWAR SUHAIL, TRUONG DOUGLAS D, CHO SEON-MEE, SHINDE RANJIT INDRAJIT, SORENSEN CARL A, TANAKA TSUTOMU, KUDELA JOZEF, WHITE JOHN M
Year of Publication 08.10.2014
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Year of Publication 08.10.2014
Patent