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Method for transferring one or more substrates between process modules or load lock stations
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Year of Publication 11.11.2013
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Method for transferring substrate to two or more process modules
LIU, REX, ZHU, SIMON, SHIN, GENE, MAK, ALFRED, WANG, XIAOMING, PARK, KON, RON, ROSE, WU, TZYUNG TERRY, LEI, LAWRENCE CHUNG-LAI, PAK, SANGSUN (SAM)
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Year of Publication 11.07.2013
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Method for transferring a substrate to two or more process modules
ROSE RONALD L, PARK KON, ZHU SIMON, SHIN GENE, WANG XIAOMING, LIU REX, PAK SAMUEL S, LEI LAWRENCE CHUNG-LAI, MAK ALFRED, WU TZYUNG TERRY
Year of Publication 27.02.2013
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Year of Publication 27.02.2013
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Method for transferring one or more substrates between process modules or load lock stations
LIU, REX, ZHU, SIMON, SHIN, GENE, MAK, ALFRED, WANG, XIAOMING, PARK, KON, WU, TZYUNG TERRY, LEI, LAWRENCE CHUNG-LAI
Year of Publication 16.07.2010
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Year of Publication 16.07.2010
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Processing systems, transport system and transport method for substrate and mobile transverse chamber
LIU, REX, ZHU, SIMON, SHIN, GENE, MAK, ALFRED, WU, TERRY, LOH, YING-TSONG, WANG, XIAOMING, PARK, KON, RON, ROSE, LEI, LAWRENCE CHUNG-LAI, PAK, SANGSUN (SAM)
Year of Publication 01.01.2011
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Year of Publication 01.01.2011
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Method for transferring substrate to two or more process modules
LIU, REX, ZHU, SIMON, SHIN, GENE, MAK, ALFRED, WANG, XIAOMING, PARK, KON, RON, ROSE, WU, TZYUNG TERRY, LEI, LAWRENCE CHUNG-LAI, PAK, SANGSUN (SAM)
Year of Publication 01.08.2010
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Year of Publication 01.08.2010
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Method for transferring a substrate to two or more process modules
ROSE RONALD L, PARK KON, ZHU SIMON, SHIN GENE, WANG XIAOMING, LIU REX, PAK SAMUEL S, LEI LAWRENCE CHUNG-LAI, MAK ALFRED, WU TZYUNG TERRY
Year of Publication 07.07.2010
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Year of Publication 07.07.2010
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System for processing substrates, convey system and method and mobile transverse chamber
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Year of Publication 07.07.2010
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Year of Publication 07.07.2010
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