Semiconductor device having capacitor and method of fabricating the same
HAN JEONG-NAM, SHIM WOO-GWAN, PARK IM-SOO, OH JUNG-MIN, HONG CHANG-KI
Year of Publication 17.05.2007
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Year of Publication 17.05.2007
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Methods of forming a semiconductor device including a metal silicide layer between a conductive plug and a bottom electrode of a capacitor
Choi, Jeong-Sik, Chung, Jung-Hee, Shim, Woo-Gwan, Kim, Young-Sun, Choi, Jae-Hyoung, Oh, Se-Hoon, Yoo, Cha-Young
Year of Publication 20.02.2007
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Year of Publication 20.02.2007
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SEMICONDUCTOR DEVICE HAVING CAPACITOR AND METHOD OF FORMING THE SAME
HONG, CHANG KI, OH, JUNG MIN, HAN, JEONG NAM, SHIM, WOO GWAN, PARK, IM SOO
Year of Publication 24.01.2007
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Year of Publication 24.01.2007
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Method of manufacturing a semiconductor device using a polysilicon etching mask
HAN WOO-SUNG, HAN JEONG-NAM, CHOI SANG-JUN, SHIM WOO-GWAN, HONG CHANG-KI
Year of Publication 03.02.2005
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Year of Publication 03.02.2005
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METHOD FOR MANUFACTURING FLASH MEMORY HAVING U-SHAPED FLOATING GATE
HONG CHANGKI, HAN JEONG-NAM, CHOI SANG-JUN, KIM DONGAN, SHIM WOO-GWAN, CHI KYOKYU, LEE HYO-SAN, KANG CHANG-JIN
Year of Publication 09.11.2006
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Year of Publication 09.11.2006
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Method of fabricating flash memory with u-shape floating gate
CHI KYEONG-KOO, HAN JEONG-NAM, CHOI SANG-JUN, KIM DONGAN, SHIM WOO-GWAN, LEE HYO-SAN, HONG CHANG-KI, KANG CHANG-JIN
Year of Publication 02.11.2006
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Year of Publication 02.11.2006
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METHOD OF FABRICATING FLASH MEMORY WITH U TYPE FLOATING GATE
HONG, CHANG KI, KIM, DONG CHAN, LEE, HYO SAN, HAN, JEONG NAM, SHIM, WOO GWAN, CHI, KYEONG KOO, KANG, CHANG JIN, CHOI, SANG JUN
Year of Publication 01.11.2006
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Year of Publication 01.11.2006
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DRYING METHODS USING SUPERCRITICAL FLUID
HONG, CHANG KI, OH, JUNG MIN, LEE, HYO SAN, LEE, KUN TACK, HAN, JEONG NAM, SHIM, WOO GWAN, LIM, KWON TAEK, HWANG, HA SOO, HALDIRAL YUVARAJ, JUNG, JAE MOK
Year of Publication 19.05.2008
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Year of Publication 19.05.2008
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METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE HAVING DUAL PLUG
HONG, CHANG KI, PARK, JONG HO, HAN, JEONG NAM, SHIM, WOO GWAN, CHOI, SANG JUN, CHO, HAN KU
Year of Publication 12.06.2006
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Year of Publication 12.06.2006
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SINGLE-SUBSTRATE TYPE APPARATUS FOR PROCESSING A SUBSTRATE
LEE KANG-YOUN, KIM IN-GI, HAN JEONG-NAM, SHIM WOO-GWAN, LEE KUN-TACK, HONG CHANG-KI, KIM YOUNG-OK
Year of Publication 28.02.2008
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Year of Publication 28.02.2008
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ETCHING, CLEANING AND DRYING METHODS USING SUPERCRITICAL FLUID AND CHAMBER SYSTEMS FOR THESE PROCESSES
HONG, CHANG KI, OH, JUNG MIN, LEE, HYO SAN, LEE, KUN TACK, HAN, JEONG NAM, SHIM, WOO GWAN, LIM, KWON TAEK, HWANG, HA SOO, HALDIRAL YUVARAJ, JUNG, JAE MOK
Year of Publication 28.11.2007
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Year of Publication 28.11.2007
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