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Effect of proton doping and heat treatment on the structure of single crystal silicon
by
Asadchikov1, Victor E
,
Dyachkova, Irina G
,
Zolotov, Denis A
,
Krivonosov, Yuri S
,
Bublik, Vladimir T
,
Shikhov
,
Alexander I
Published in
Modern Electronic Materials
(01.03.2019)
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Journal Article
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engineering
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annealing
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deformation effects
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heat treating
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heat treatment
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hydrogen
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hydrogen ions
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