E-Beam Hot Spot Inspection for Early Detection of Systematic Patterning Problems for a 22 nm SOI Technology
Patterson, Oliver D., Ryan, Deborah A., Monkowski, Michael D., Nguyen-Ngoc, Dominique, Morgenfeld, Bradley, Chung-Han Lee, Chieh-Hung Liu, Chi-Ming Chan, Shih-Tsung Chen, Lei, Shuen-Cheng Chris
Published in IEEE transactions on semiconductor manufacturing (01.11.2014)
Published in IEEE transactions on semiconductor manufacturing (01.11.2014)
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Journal Article
Early detection of systematic patterning problems for a 22nm SOI technology using E-beam hot spot inspection
Patterson, Oliver D., Ryan, Deborah A., Monkowski, Mike D., Nguyen-ngoc, Dominique, Morgenfeld, Bradley, Chung-ham Lee, Chieh-hung Liu, Chi-ming Chen, Shih-tsung Chen
Published in ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference (01.05.2013)
Published in ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference (01.05.2013)
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Conference Proceeding
E-beam inspection for combination use of defect detection and CD measurement
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Published in 2012 SEMI Advanced Semiconductor Manufacturing Conference (01.05.2012)
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Conference Proceeding
Bankruptcy Prediction Using Cerebellar Model Neural Networks
Chung, Chang-Chih, Chen, Tsung-Shih, Lin, Lee-Hsuan, Lin, Yu-Chen, Lin, Chih-Min
Published in International journal of fuzzy systems (01.04.2016)
Published in International journal of fuzzy systems (01.04.2016)
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Oriented polycrystalline α-HgI2 thick films grown by physical vapor deposition
SHIH, Chen-Tsung, HUANG, Tang-Jung, LUO, Ying-Zi, LAN, San-Min, CHIU, Kuan-Cheng
Published in Journal of crystal growth (01.07.2005)
Published in Journal of crystal growth (01.07.2005)
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Journal Article
Thermally stimulated currents in α-HgI2 polycrystalline films
Shiu, Yue-Tsang, Huang, Tang-Jung, Shih, Chen-Tsung, Su, Chih-Feng, Lan, San-Min, Chiu, Kuan-Cheng
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Published in Journal of physics. D, Applied physics (07.04.2007)
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Journal Article
Effects of the source temperature on the formation of a metastable HgI 2 phase and consequences for the nucleation and growth behaviors in PVT ampoules
Lin, Jun-Xian, Shih, Chen-Tsung, Zhou, Han-Tang, Luo, Ying-Zi, Liao, Jian-Liang, Chiu, Kuan-Cheng
Published in Journal of crystal growth (15.04.2006)
Published in Journal of crystal growth (15.04.2006)
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Journal Article
Thermally stimulated currents in alpha-Hgbeta polycrystalline films
Shiu, Yue-Tsang, Huang, Tang-Jung, Shih, Chen-Tsung, Su, Chih-Feng, Lan, San-Min, Chiu, Kuan-Cheng
Published in Journal of physics. D, Applied physics (07.04.2007)
Published in Journal of physics. D, Applied physics (07.04.2007)
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Journal Article
Thermally stimulated currents in α-HgI 2 polycrystalline films
Shiu, Yue-Tsang, Huang, Tang-Jung, Shih, Chen-Tsung, Su, Chih-Feng, Lan, San-Min, Chiu, Kuan-Cheng
Published in Journal of physics. D, Applied physics (07.04.2007)
Published in Journal of physics. D, Applied physics (07.04.2007)
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Journal Article