Ultra-thin ALD-MnN barrier for low resistance advanced interconnect technology
Shin-Yi Yang, Ming-Han Lee, Ching-Fu Yeh, Shih-Kang Fu, Yu-Chen Chan, Shau-Lin Shue, Min Cao
Published in 2017 IEEE International Interconnect Technology Conference (IITC) (01.05.2017)
Published in 2017 IEEE International Interconnect Technology Conference (IITC) (01.05.2017)
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Conference Proceeding
The tribological behavior of modified diamond nanoparticles in liquid paraffin
Peng, De-Xing, Kang, Yuan, Chen, Cheng-Hsien, Chen Fu-chun Shu, Shih-Kang
Published in Industrial lubrication and tribology (19.06.2009)
Published in Industrial lubrication and tribology (19.06.2009)
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Journal Article
Semiconductor device and manufacturing method thereof
Shue, Shau-Lin, Su, Li-Lin, Fu, Shih-Kang, Wu, Hsien-Chang, Lee, Ming-Han
Year of Publication 21.09.2021
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Year of Publication 21.09.2021
Patent