Film thickness monitoring system and method using the same
Shih, Pang-Min, Huang, Kuo-Hsin, Hsu, Yu-Lin, Lin, Chien-Hung, Sung, Chao-Feng
Year of Publication 16.10.2018
Get full text
Year of Publication 16.10.2018
Patent
FILM THICKNESS MONITORING SYSTEM AND METHOD USING THE SAME
Huang Kuo-Hsin, Lin Chien-Hung, Sung Chao-Feng, Hsu Yu-Lin, Shih Pang-Min
Year of Publication 08.02.2018
Get full text
Year of Publication 08.02.2018
Patent
Vacuum process system and intelligent valve thereof
CHEN, CHIEN-HSUN, CHEN, CHANG-YING, WU, KUEN-YI, SHIH, PANG-MIN, KOU, CHWUNG-SHAN, LIN, HSUAN-YU, HSU, CHUN-SHU, YEH, WEN-YUNG
Year of Publication 01.01.2023
Get full text
Year of Publication 01.01.2023
Patent
Film thickness monitoring system and method using the same
SUNG, CHAO-FENG, LIN, CHIEN-HUNG, SHIH, PANG-MIN, HSU, YU-LIN, HUANG, KUO-HSIN
Year of Publication 16.02.2018
Get full text
Year of Publication 16.02.2018
Patent
Film thickness monitoring system, chamber thereof and method for monitoring film thickness deposition process
SUNG CHAO FENG, HUANG KUO HSIN, LIN CHIEN HUNG, HSU YU LIN, SHIH PANG MIN
Year of Publication 13.02.2018
Get full text
Year of Publication 13.02.2018
Patent
FILM THICKNESS MONITORING SYSTEM AND METHOD USING THE SAME
SUNG, CHAO-FENG, LIN, CHIEN-HUNG, SHIH, PANG-MIN, HSU, YU-LIN, HUANG, KUO-HSIN
Year of Publication 21.11.2017
Get full text
Year of Publication 21.11.2017
Patent