A Novel Cross-Spacer Phase Change Memory with Ultra-Small Lithography Independent Contact Area
Chen, W.S., Hsiao, T.C., Yeh, J.T., Chiou, S.H., Liu, M.Y., Wang, T.C., Chein, L.L., Huang, C.M., Shih, N.T., Tu, L.S., Huang, D., Lee, C.M., Yu, T.H., Kao, M.J., Tsai, M.-J., Chao, D.S., Chen, Y.C., Chen, F., Chen, C.W., Yen, P.H., Chen, M.J., Wang, W.H.
Published in 2007 IEEE International Electron Devices Meeting (01.12.2007)
Published in 2007 IEEE International Electron Devices Meeting (01.12.2007)
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