Synthesis of boron carbonitride (BCN) films by plasma-enhanced chemical vapor deposition using trimethylamine borane as a molecular precursor
Kida, Tetsuya, Shigezumi, Kazunari, Mannan, Md. Abdul, Akiyama, Morito, Baba, Yuji, Nagano, Masamitsu
Published in Vacuum (01.05.2009)
Published in Vacuum (01.05.2009)
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