A highly manufacturable 28nm CMOS low power platform technology with fully functional 64Mb SRAM using dual/tripe gate oxide process
Wu, Shien-Yang, Liaw, J.J., Lin, C.Y., Chiang, M.C., Yang, C.K., Cheng, J.Y., Tsai, M.H., Liu, M.Y., Wu, P.H., Chang, C.H., Hu, L.C., Lin, C.I., Chen, H.F., Chang, S.Y., Wang, S.H., Tong, P.Y., Hsieh, Y.L., Pan, K.H., Hsieh, C.H., Chen, C.H., Yao, C.H., Chen, C.C., Lee, T.L., Chang, C.W., Lin, H.J., Chen, S.C., Shieh, J.H., Tsai, M.H., Jang, S.M., Chen, K.S., Ku, Y., See, Y.C, Lo, W.J.
Published in 2009 Symposium on VLSI Technology (01.06.2009)
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Published in 2009 Symposium on VLSI Technology (01.06.2009)
Conference Proceeding
Ionic-size effect on the structure and Tc of T′-(R1−xR′x)1.85Ce0.15CuO4 (R Pr, Nd, Sm and Eu; R′ Gd and Y)
Meen, T.H., Yang, H.D., Huang, W.J., Chen, Y.C., Lee, W.H., Shieh, J.H., Ku, H.C.
Published in Physica. C, Superconductivity (01.04.1996)
Published in Physica. C, Superconductivity (01.04.1996)
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Superconductivity and magnetic ordering in Pb 2Sr 2PrCu 3O 8.01
Li, W.-H., Hsieh, W.T., Shyr, S.T., Lee, K.C., Shieh, J.H., Ku, H.C.
Published in Physica. B, Condensed matter (1995)
Published in Physica. B, Condensed matter (1995)
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Characterization of strip induced damage in ultra low-k dielectric
Tsai, J.S., Su, Y.N., Huang, R.Y., Chiou, J.M., Shieh, J.H., Chu, H.Y., Lee, J.J., Ting, C.Y., Jang, S.M., Liang, M.S.
Published in ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005 (2005)
Published in ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005 (2005)
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Conference Proceeding
Coexistence of antiferromagnetic order and superconductivity with TN higher than Tc in DyNi2B2C
LIN, M. S, SHIEH, J. H, YOU, Y. B, HSU, Y. Y, CHEN, J. W, LIN, S. H, YAO, Y. D, CHEN, Y. Y, HO, J. C, KU, H. C
Published in Physica. C, Superconductivity (15.07.1995)
Published in Physica. C, Superconductivity (15.07.1995)
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Characterization of the tumor-specific activity of WT1 specific T cells generated in vitro from normal individuals by sensitization with WT1-peptide loaded autologous EBV transformed B cells
Doubrovina, E.S., Doubrovin, M.M., Shieh, J.H., Bierwiaczonek, A., Heller, G., Pamer, E., O’Reilly, R.J.
Published in Biology of blood and marrow transplantation (01.02.2004)
Published in Biology of blood and marrow transplantation (01.02.2004)
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Superconductivity and magnetic ordering in Pb2Sr2PrCu3O8.01
Li, W.-H., Hsieh, W.T., Shyr, S.T., Lee, K.C., Shieh, J.H., Ku, H.C.
Published in Physica. B, Condensed matter (01.02.1995)
Published in Physica. B, Condensed matter (01.02.1995)
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Effect of ash process on leakage mechanism of Cu/ELK (k=2.5) interconnect for 65/45 nm generation
Tsai, J.S., Su, Y.N., Hsu, J.W., Yang, J.L., Shieh, J.H., Jang, S.M., Liang, M.S.
Published in Proceedings of the IEEE 2005 International Interconnect Technology Conference, 2005 (2005)
Published in Proceedings of the IEEE 2005 International Interconnect Technology Conference, 2005 (2005)
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Conference Proceeding
Integration of Cu and extra low-k dielectric (k=2.5/spl sim/2.2) for 65/45/32nm generations
Su, Y.N., Shieh, J.H., Tsai, J.S., Ting, C.Y., Lin, C.H., Chou, C.L., Hsu, J.W., Jang, S.M., Liang, M.S.
Published in IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest (2005)
Published in IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest (2005)
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Conference Proceeding
A 32nm CMOS Low Power SoC Platform Technology for Foundry Applications with Functional High Density SRAM
Shien-Yang Wu, Chou, C.W., Lin, C.Y., Chiang, M.C., Yang, C.K., Liu, M.Y., Hu, L.C., Chang, C.H., Wu, P.H., Chen, H.F., Chang, S.Y., Wang, S.H., Tong, P.Y., Hsieh, Y.L., Liaw, J.J., Pan, K.H., Hsieh, C.H., Chen, C.H., Cheng, J.Y., Yao, C.H., Wan, W.K., Lee, T.L., Huang, K.T., Lin, K.C., Yeh, L.Y., Ku, K.C., Chen, S.C., Lin, H.J., Jang, S.M., Lu, Y.C., Shieh, J.H., Tsai, M.H., Song, J.Y., Chen, K.S., Chang, V., Cheng, S.M., Yang, S.H., Diaz, C.H., See, Y.C., Liang, M.S.
Published in 2007 IEEE International Electron Devices Meeting (01.12.2007)
Published in 2007 IEEE International Electron Devices Meeting (01.12.2007)
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Conference Proceeding
Supercritical CO/sub 2/ clean with novel solution for 65 nm and beyond BEOL performance improvement
Tseng, W.H., Yang, C.M., Wu, W.J., Wang, C.Y., Hu, J.C., Hsiung, C.H., Lin, Y.L., Bao, T.I., Yang, J.L., Shieh, J.H., Jeng, C.C., Lin, J.C., Huang, I.L., Chen, H.C., Lo, H., Wang, J., Yu, C.H., Liang, M.S.
Published in Proceedings of the IEEE 2005 International Interconnect Technology Conference, 2005 (2005)
Published in Proceedings of the IEEE 2005 International Interconnect Technology Conference, 2005 (2005)
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Conference Proceeding
Damage-Free Low-k Treatment Verified by a Novel Microwave Measurement
Tsai, J.S., Liang, M.C., Lee, T.L., Chen, L.C., Shieh, J.H., Lee, J.J., Hwang, R.L., Jang, S.M., Liang, M.S.
Published in 2006 International Interconnect Technology Conference (2006)
Published in 2006 International Interconnect Technology Conference (2006)
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Conference Proceeding
Reliability and conduction mechanism study on organic ultra low-k (k=2.2) for 65/45 nm hybrid Cu damascene technology
Su, Y.N., Shieh, J.H., Perng, B.C., Jang, S.M., Liang, M.S.
Published in Proceedings of the IEEE 2005 International Interconnect Technology Conference, 2005 (2005)
Published in Proceedings of the IEEE 2005 International Interconnect Technology Conference, 2005 (2005)
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