Etching Enhancement Followed by Nitridation on Low-$k$ SiOCH Film in Ar/C5F10O Plasma
Miyawaki, Yudai, Shibata, Emi, Kondo, Yusuke, Takeda, Keigo, Kondo, Hiroki, Ishikawa, Kenji, Okamoto, Hidekazu, Sekine, Makoto, Hori, Masaru
Published in Jpn J Appl Phys (01.02.2013)
Published in Jpn J Appl Phys (01.02.2013)
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Habitat management of little terns in Japan’s highly developed landscape
Fujita, Go, Totsu, Kumiko, Shibata, Emi, Matsuoka, Yoshimi, Morita, Hiroyuki, Kitamura, Wataru, Kuramoto, Noboru, Masuda, Naoya, Higuchi, Hiroyoshi
Published in Biological conservation (01.09.2009)
Published in Biological conservation (01.09.2009)
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Journal Article
Etching Enhancement Followed by Nitridation on Low-k SiOCH Film in Ar/C 5 F 10 O Plasma
Miyawaki, Yudai, Shibata, Emi, Kondo, Yusuke, Takeda, Keigo, Kondo, Hiroki, Ishikawa, Kenji, Okamoto, Hidekazu, Sekine, Makoto, Hori, Masaru
Published in Japanese Journal of Applied Physics (01.02.2013)
Published in Japanese Journal of Applied Physics (01.02.2013)
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Journal Article
Etching Enhancement Followed by Nitridation on Low-k SiOCH Film in Ar/C sub(5)F sub(10)O Plasma
Miyawaki, Yudai, Shibata, Emi, Kondo, Yusuke, Takeda, Keigo, Kondo, Hiroki, Ishikawa, Kenji, Okamoto, Hidekazu, Sekine, Makoto, Hori, Masaru
Published in Japanese Journal of Applied Physics (01.02.2013)
Published in Japanese Journal of Applied Physics (01.02.2013)
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Journal Article
Habitat management of little terns in Japan's highly developed landscape: The Conservation and Management of Biodiversity in Japan
GO FUJITA, TOTSU, Kumiko, SHIBATA, Emi, MATSUOKA, Yoshimi, MORITA, Hiroyuki, KITAMURA, Wataru, KURAMOTO, Noboru, MASUDA, Naoya, HIGUCHI, Hiroyoshi
Published in Biological conservation (2009)
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Published in Biological conservation (2009)
Journal Article