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METHOD AND DEVICE FOR DETECTIONG IMAGE PLANE

METHOD AND DEVICE FOR DETECTIONG IMAGE PLANE

by INAKAKI, AKIRA, SHIBA, MASATAKA, AIBA, YOSHIHIKO
Year of Publication 18.07.1994

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Patent

METHOD FOR PRODUCING ELECTRONIC DEVICE AND FOREIGN MATTER ANALYSER THEREFOR

METHOD FOR PRODUCING ELECTRONIC DEVICE AND FOREIGN MATTER ANALYSER THEREFOR

by IBE, HIDEFUMI, WATANABE, KENJI, SAKAMOTO, TSUTOMU, SHIBA, MASATAKA, SHIMASE, AKIRA
Year of Publication 10.06.1999

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Patent

EXPOSURE APPARATUS AND METHOD

EXPOSURE APPARATUS AND METHOD

by NOGUCHI, MINORI, KENBO, YUKIO, YOSHITAKE, YASUHIRO, MURAYAMA, MAKOTO, SHIBA, MASATAKA, OSHIDA, YOSHITADA
Year of Publication 20.04.1995

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Patent

PROCESS CONTROL SYSTEM

PROCESS CONTROL SYSTEM

by MIYAZAKI, ISAO, ISOGAI, SEIJI, WATANABE, KENJI, ISHIKAWA, SEIJI, HAMADA, TOSHIMITSU, OHYAMA, YUICHI, SHIBA, MASATAKA, ASAKAWA, TERUSHIGE, NAKAZATO, JUN, SUGIMOTO, HIDEKUNI, ARIGA, MAKOTO, SHIGYO, YOSHIHARU, YOSHITAKE, YASUHIRO, SUZUKI, IKUO, IKOTA, MASAMI, NOZOE, MARI, MIZUNO, FUMIO, YOKOUCHI, TETSUJI
Year of Publication 25.09.1997

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Patent

LIQUID CRYSTAL DISPLAY AND ITS MANUFACTURE

LIQUID CRYSTAL DISPLAY AND ITS MANUFACTURE

by SHIBA MASATAKA
Year of Publication 20.02.1990

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Patent

MANUFACTURE FOR SEMICONDUCTOR INTEGRATED CIRCUIT

MANUFACTURE FOR SEMICONDUCTOR INTEGRATED CIRCUIT

by SHIMODA ATSUSHI, SHIBA MASATAKA
Year of Publication 11.09.1998

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Patent

JP2634620B

JP2634620B

by NAKADA TOSHIHIKO, SHIBA MASATAKA
Year of Publication 30.07.1997

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Patent

JP2574807B

JP2574807B

by NAKADA TOSHIHIKO, SHIBA MASATAKA
Year of Publication 22.01.1997

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Patent

FOREIGN MATTER DETECTING LIGHT RECEIVING SYSTEM FOR WAFER

FOREIGN MATTER DETECTING LIGHT RECEIVING SYSTEM FOR WAFER

by YANAI TOSHIAKI, SHIBA MASATAKA
Year of Publication 08.12.1995

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Patent

SUBSTRATE INCLINATION OF DETECTOR

SUBSTRATE INCLINATION OF DETECTOR

by FUKUDA KENICHIRO, SHIBA MASATAKA
Year of Publication 27.08.1993

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Patent

ALIGNMENT MARK

ALIGNMENT MARK

by SHIBA MASATAKA, YOSHITAKE YASUHIRO
Year of Publication 13.08.1993

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Patent

ALIGNING METHOD AND APPARATUS FOR EXPOSING SEMICONDUCTOR

ALIGNING METHOD AND APPARATUS FOR EXPOSING SEMICONDUCTOR

by NAKATA, TOSHIHIKO, SHIBA, MASATAKA
Year of Publication 12.12.1992

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Patent

Method of determining lethality of defects in circuit pattern inspection, method of selecting defects to be reviewed, and inspection system of circuit patterns involved with the methods

Method of determining lethality of defects in circuit pattern inspection, method of selecting defects to be reviewed, and inspection system of circuit patterns involved with the methods

by Yoshitake, Yasuhiro, Shiba, Masataka, Shimoda, Atsushi
Year of Publication 29.04.2003

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Patent

Method of determining lethality of defects in circuit pattern inspection, method of selecting defects to be reviewed, and inspection system of circuit patterns involved with the methods

Method of determining lethality of defects in circuit pattern inspection, method of selecting defects to be reviewed, and inspection system of circuit patterns involved with the methods

by SHIMODA ATSUSHI, YOSHITAKE YASUHIRO, SHIBA MASATAKA
Year of Publication 29.04.2003

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Patent

Exposure apparatus and method

Exposure apparatus and method

by Noguchi, Minori, Kenbo, Yukio, Oshida, Yoshitada, Shiba, Masataka, Yoshitaka, Yasuhiro, Murayama, Makoto
Year of Publication 20.10.2009

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Patent

Exposure apparatus and method

Exposure apparatus and method

by MURAYAMA MAKOTO, OSHIDA YOSHITADA, KENBO YUKIO, NOGUCHI MINORI, SHIBA MASATAKA, YOSHITAKA YASUHIRO
Year of Publication 20.10.2009

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Patent

Exposure apparatus and method

Exposure apparatus and method

by MURAYAMA MAKOTO, OSHIDA YOSHITADA, KENBO YUKIO, NOGUCHI MINORI, SHIBA MASATAKA, YOSHITAKA YASUHIRO
Year of Publication 06.10.2009

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Patent

Exposure apparatus and method

Exposure apparatus and method

by Noguchi, Minori, Kenbo, Yukio, Oshida, Yoshitada, Shiba, Masataka, Yoshitaka, Yasuhiro, Murayama, Makoto
Year of Publication 06.10.2009

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Patent

Projection alignment method and apparatus

Projection alignment method and apparatus

by SHIBA; MASATAKA, NAKATA; TOSHIHIKO
Year of Publication 06.03.1990

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Patent

ALIGNING METHOD FOR EXPOSING SEMICONDUCTOR

ALIGNING METHOD FOR EXPOSING SEMICONDUCTOR

by NAKADA TOSHIHIKO, SHIBA MASATAKA
Year of Publication 13.09.1989

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Patent

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