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Year of Publication 05.03.2019
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SUBSTRATE SUPPORT WITH SYMMETRICAL FEED STRUCTURE
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Year of Publication 06.10.2010
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Year of Publication 08.09.2020
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SUBSTRATE SUPPORT WITH SYMMETRICAL FEED STRUCTURE
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Year of Publication 14.02.2019
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Substrate support with symmetrical feed structure
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Year of Publication 09.10.2018
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SUBSTRATE SUPPORT WITH SYMMETRICAL FEED STRUCTURE
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Year of Publication 24.12.2015
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Substrate support with symmetrical feed structure
ZHOU XIAOPING, SHEYNER ANCHEL, BUCHBERGER, JR. DOUGLAS A, LIN XING, NGUYEN ANDREW
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Year of Publication 01.09.2015
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Year of Publication 21.01.2014
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Plasma reactor with uniform process rate distribution by improved RF ground return path
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Year of Publication 29.01.2013
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SUBSTRATE SUPPORT WITH SYMMETRICAL FEED STRUCTURE
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Year of Publication 28.06.2012
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Year of Publication 28.06.2012
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SUBSTRATE SUPPORT WITH SYMMETRICAL FEED STRUCTURE
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Year of Publication 26.04.2012
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Year of Publication 26.04.2012
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SUBSTRATE SUPPORT WITH SYMMETRICAL FEED STRUCTURE
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Year of Publication 26.04.2012
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Year of Publication 26.04.2012
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METHODS AND APPARATUS FOR CONTROLLING SUBSTRATE TEMPERATURE IN A PROCESS CHAMBER
ZHOU XIAOPING, SHEYNER ANCHEL, TODOROW VALENTIN, BUCHBERGER, JR. DOUGLAS A, LIN XING, NGUYEN ANDREW
Year of Publication 19.04.2012
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Year of Publication 19.04.2012
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Twin chamber processing system
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Year of Publication 21.11.2019
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Year of Publication 21.11.2019
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Method and apparatus for removing polymer from the wafer backside and edge
MERRY WALTER R, BALAKRISHNA AJIT, SHEYNER ANCHEL, YOUSIF IMAD, SALINAS MARTIN JEFFREY, FUNG NANCY, RUI YING, RAUF SHAHID
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Year of Publication 11.12.2012
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Method and apparatus for removing polymer from the wafer backside and edge
Yousif, Imad, Sheyner, Anchel, Balakrishna, Ajit, Fung, Nancy, Rui, Ying, Salinas, Martin Jeffrey, Merry, Walter R, Rauf, Shahid
Year of Publication 11.12.2012
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Year of Publication 11.12.2012
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Substrate support with symmetrical feed structure
LIN, XING, ZHOU, XIAOPING, NGUYEN, ANDREW, SHEYNER, ANCHEL, BUCHBERGER JR., DOUGLAS A
Year of Publication 01.07.2017
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Year of Publication 01.07.2017
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