(Invited) Control of Atomic Layer Reactions in Plasma Processing
Ventzek, Peter, Sherpa, S D, Wang, M, Rastogi, V, Ranjan, Alok
Published in ECS transactions (16.08.2016)
Published in ECS transactions (16.08.2016)
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Journal Article
(Invited) Control of Atomic Layer Reactions in Plasma Processing
Ventzek, Peter, Sherpa, S D, Wang, M, Rastogi, V, Ranjan, Alok
Published in Meeting abstracts (Electrochemical Society) (01.09.2016)
Published in Meeting abstracts (Electrochemical Society) (01.09.2016)
Get full text
Journal Article