High density metal insulator metal capacitors using PECVD nitride for mixed signal and RF circuits
Kar-Roy, A., Chun Hu, Racanelli, M., Compton, C.A., Kempf, P., Jolly, G., Sherman, P.N., Jie Zheng, Zhe Zhang, Aiguo Yin
Published in Proceedings of the IEEE 1999 International Interconnect Technology Conference (Cat. No.99EX247) (1999)
Published in Proceedings of the IEEE 1999 International Interconnect Technology Conference (Cat. No.99EX247) (1999)
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