Optimizing the UHP gas distribution system for a plasma etch tool
Fine, Stephen M, McGuire, John T, Choi, Baik-Soon, Bzik, Thomas, Crofton, Kevin T, Melnyk, Andrew, Perez, Max, Sheriff, David P
Published in Solid state technology (01.03.1996)
Get full text
Published in Solid state technology (01.03.1996)
Magazine Article
Optimizing the UHP gas distribution system for a plasma etch tool
Fine, Stephen M, McGuire, John T, Choi, Baik-Soon, Bzik, Thomas, Crofton, Kevin T, Melnyk, Andrew, Perez, Max, Sheriff, David P
Published in Solid state technology (01.01.1996)
Get full text
Published in Solid state technology (01.01.1996)
Magazine Article