by Varel, Ça da, Shih, Yi-Chun, Otis, Brian P, Shen, Tueng S, Böhringer, Karl F
Published in Journal of micromechanics and microengineering (01.04.2014)

by Varel, C., Yi-Chun Shih, Otis, B. P., Shen, T. S., Bohringer, K. F.
Published in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2012)

by RATNER BUDDY D, SHEN TUENG T
Year of Publication 24.03.2010